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MONMOUTHSHIRE, GB
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus
Patent number
12,308,240
Issue date
May 20, 2025
SPTS Technologies Limited
Janet Hopkins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor wafer dicing process
Patent number
12,100,619
Issue date
Sep 24, 2024
SPTS Technologies Limited
Martin Hanicinec
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of plasma etching and plasma dicing
Patent number
10,872,775
Issue date
Dec 22, 2020
SPTS Technologies Limited
Oliver J Ansell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching
Patent number
9,842,772
Issue date
Dec 12, 2017
SPTS Technologies Limited
Jash Patel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of surface treatment of semiconductor substrates
Patent number
6,261,962
Issue date
Jul 17, 2001
Surface Technology Systems Limited
Jyoti Kiron Bhardwaj
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for etching a substrate
Patent number
6,187,685
Issue date
Feb 13, 2001
Surface Technology Systems Limited
Janet Hopkins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of surface treatment of semiconductor substrates
Patent number
6,051,503
Issue date
Apr 18, 2000
Surface Technology Systems Limited
Jyoti Kiron Bhardwaj
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method of Plasma Etching
Publication number
20230170188
Publication date
Jun 1, 2023
SPTS TECHNOLOGIES LIMITED
Alex Huw Wood
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus
Publication number
20220199409
Publication date
Jun 23, 2022
SPTS TECHNOLOGIES LIMITED
Janet Hopkins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Wafer Dicing Process
Publication number
20210175122
Publication date
Jun 10, 2021
SPTS TECHNOLOGIES LIMITED
Martin Hanicinec
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF PLASMA ETCHING AND PLASMA DICING
Publication number
20180350615
Publication date
Dec 6, 2018
SPTS TECHNOLOGIES LIMITED
Oliver J. ANSELL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ETCHING
Publication number
20150287637
Publication date
Oct 8, 2015
SPTS TECHNOLOGIES LIMITED
JASH PATEL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus
Publication number
20020185226
Publication date
Dec 12, 2002
Leslie Michael Lea
H01 - BASIC ELECTRIC ELEMENTS