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last 30 patents
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Patent Grant
Shallow trench isolation method for reducing oxide thickness variat...
Patent number
7,098,116
Issue date
Aug 29, 2006
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Cheng Lu
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Novel shallow trench isolation method for reducing oxide thickness...
Publication number
20050153519
Publication date
Jul 14, 2005
Taiwan Semiconductor Manufacturing Co.
Chih-Cheng Lu
H01 - BASIC ELECTRIC ELEMENTS