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Jang Woo Shim
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Gyeonggi-do, KR
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last 30 patents
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Patent Grant
Substrate rotating and oscillating apparatus for rapid thermal process
Patent number
8,346,068
Issue date
Jan 1, 2013
Asia Pacific Systems Inc.
Jang Woo Shim
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
HEATER BLOCK OF RAPID THERMAL PROCESS APPARATUS
Publication number
20110002676
Publication date
Jan 6, 2011
Asia Pacific Systems Inc.
Jang Woo Shim
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SUBSTRATE ROTATING AND OSCILLATING APPARATUS FOR RAPID THERMAL PROCESS
Publication number
20100322603
Publication date
Dec 23, 2010
Asia Pacific Systems Inc.
Jang Woo Shim
H01 - BASIC ELECTRIC ELEMENTS