Jarmo Ilmari Maula

Person

Espoo, FI

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus, method and reaction chamber
- Patent number 10,590,536
- Issue date Mar 17, 2020
- Beneq Oy
- Mikko Soderlund
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus, method and reaction chamber
- Patent number 10,167,551
- Issue date Jan 1, 2019
- Beneq Oy
- Mikko Soderlund
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming an electrically conductive oxide film, an electr...
- Patent number 9,892,814
- Issue date Feb 13, 2018
- Beneq Oy
- Jarmo Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming an electrically conductive oxide film, an electr...
- Patent number 9,290,840
- Issue date Mar 22, 2016
- Beneq Oy
- Jarmo Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for coating
- Patent number 8,945,676
- Issue date Feb 3, 2015
- Beneq Oy
- Jarmo Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method in depositing metal oxide materials
- Patent number 8,367,561
- Issue date Feb 5, 2013
- Beneq Oy
- Jarmo Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer material and method of preparing same
- Patent number 7,901,736
- Issue date Mar 8, 2011
- Planar Systems Oy
- Jarmo Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal coatings for micro-optical elements, and method for makin...
- Patent number 7,294,360
- Issue date Nov 13, 2007
- Planar Systems, Inc.
- Jarmo Ilmari Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diaphragm valve for atomic layer deposition
- Patent number 7,191,793
- Issue date Mar 20, 2007
- Planar Systems, Inc.
- Jarmo Ilmari Maula
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Precursor material delivery system for atomic layer deposition
- Patent number 7,141,095
- Issue date Nov 28, 2006
- Planar Systems, Inc.
- Bradley J. Aitchison
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diaphragm valve with reliability enhancements for atomic layer depo...
- Patent number 7,021,330
- Issue date Apr 4, 2006
- Planar Systems, Inc.
- Jarmo Ilmari Maula
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
High-speed diaphragm valve for atomic layer deposition
- Patent number 6,941,963
- Issue date Sep 13, 2005
- Planar Systems, Inc.
- Jarmo Ilmari Maula
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Diaphragm valve for high-temperature precursor supply in atomic lay...
- Patent number 6,907,897
- Issue date Jun 21, 2005
- Planar Systems, Inc.
- Jarmo Ilmari Maula
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
ARRANGEMENT FOR PROCESSING SUBSTRATE AND SUBSTRATE CARRIER
- Publication number 20190203356
- Publication date Jul 4, 2019
- BENEQ OY
- Jarmo Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS, METHOD AND REACTION CHAMBER
- Publication number 20190127850
- Publication date May 2, 2019
- BENEQ OY
- Mikko Soderlund
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARRANGEMENT FOR PROCESSING SUBSTRATE AND SUBSTRATE CARRIER
- Publication number 20170268106
- Publication date Sep 21, 2017
- Beneq Oy
- Jarmo Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING AN ELECTRICALLY CONDUCTIVE OXIDE FILM, AN ELECTR...
- Publication number 20160172070
- Publication date Jun 16, 2016
- Beneq Oy
- Jarmo Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS, METHOD AND REACTION CHAMBER
- Publication number 20130269608
- Publication date Oct 17, 2013
- Beneq Oy
- Mikko Soderlund
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING A DECORATIVE COATING ON A GEMSTONE, A DECORATIVE...
- Publication number 20130130044
- Publication date May 23, 2013
- Beneq Oy
- Jarmo Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING AN ELECTRICALLY CONDUCTIVE OXIDE FILM, AN ELECTR...
- Publication number 20120217454
- Publication date Aug 30, 2012
- Beneq Oy
- Jarmo Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING A DECORATIVE COATING, A COATING, AND USES OF THE...
- Publication number 20120218638
- Publication date Aug 30, 2012
- Beneq Oy
- Jarmo Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYER COATING, METHOD FOR FABRICATING A MULTILAYER COATING, AN...
- Publication number 20120177903
- Publication date Jul 12, 2012
- Beneq Oy
- Sami Sneck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRUCTURE COMPRISING AT LEAST ONE REFLECTING THIN-FILM ON A SURFACE...
- Publication number 20120120514
- Publication date May 17, 2012
- Beneq Oy
- Jarmo Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARRANGEMENT FOR PROCESSING SUBSTRATE AND SUBSTRATE CARRIER
- Publication number 20120055407
- Publication date Mar 8, 2012
- Beneq Oy
- Jarmo Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR COATING
- Publication number 20120015106
- Publication date Jan 19, 2012
- Beneq Oy
- Jarmo Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DEPOSITION REACTOR
- Publication number 20110265720
- Publication date Nov 3, 2011
- Beneq Oy
- Jarmo Maula
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD IN DEPOSITING METAL OXIDE MATERIALS
- Publication number 20100167555
- Publication date Jul 1, 2010
- Beneq Oy
- Jarmo Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL COATINGS FOR MICRO-OPTICAL ELEMENTS
- Publication number 20080063802
- Publication date Mar 13, 2008
- Planar Systems, Inc.
- Jarmo Ilmari Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR MATERIAL DELIVERY SYSTEM WITH STAGING VOLUME FOR ATOMIC L...
- Publication number 20070117383
- Publication date May 24, 2007
- Planar Systems, Inc.
- Bradley J. Aitchison
- C30 - CRYSTAL GROWTH
Information Patent Application
PRECURSOR MATERIAL DELIVERY SYSTEM WITH THERMAL ENHANCEMENTS FOR AT...
- Publication number 20070089674
- Publication date Apr 26, 2007
- Planar Systems, Inc.
- Bradley J. Aitchison
- C30 - CRYSTAL GROWTH
Information Patent Application
DIAPHRAGM VALVE FOR ATOMIC LAYER DEPOSITION
- Publication number 20060174945
- Publication date Aug 10, 2006
- Planar Systems, Inc.
- Jarmo Ilmari Maula
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Multilayer material and method of preparing same
- Publication number 20060134433
- Publication date Jun 22, 2006
- PLANAR SYSTEMS OY
- Jarmo Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High-speed diaphragm valve for atomic layer deposition
- Publication number 20050011555
- Publication date Jan 20, 2005
- Jarmo Ilmari Maula
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Diaphragm valve with reliability enhancements for atomic layer depo...
- Publication number 20040262562
- Publication date Dec 30, 2004
- Jarmo Ilmari Maula
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Diaphragm valve for high-temperature precursor supply in atomic lay...
- Publication number 20040261850
- Publication date Dec 30, 2004
- Jarmo Ilmari Maula
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Conformal coatings for micro-optical elements
- Publication number 20040197527
- Publication date Oct 7, 2004
- Jarmo Ilmari Maula
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precursor material delivery system for atomic layer deposition
- Publication number 20040124131
- Publication date Jul 1, 2004
- Bradley J. Aitchison
- C30 - CRYSTAL GROWTH

Jarmo Ilmari Maula

Person

Patents Grantslast 30 patents

Apparatus, method and reaction chamber

Apparatus, method and reaction chamber

Method for forming an electrically conductive oxide film, an electr...

Method for forming an electrically conductive oxide film, an electr...

Method and apparatus for coating

Method in depositing metal oxide materials

Multilayer material and method of preparing same

Conformal coatings for micro-optical elements, and method for makin...

Diaphragm valve for atomic layer deposition

Precursor material delivery system for atomic layer deposition

Diaphragm valve with reliability enhancements for atomic layer depo...

High-speed diaphragm valve for atomic layer deposition

Diaphragm valve for high-temperature precursor supply in atomic lay...

Patents Applicationslast 30 patents

ARRANGEMENT FOR PROCESSING SUBSTRATE AND SUBSTRATE CARRIER

APPARATUS, METHOD AND REACTION CHAMBER

ARRANGEMENT FOR PROCESSING SUBSTRATE AND SUBSTRATE CARRIER

METHOD FOR FORMING AN ELECTRICALLY CONDUCTIVE OXIDE FILM, AN ELECTR...

APPARATUS, METHOD AND REACTION CHAMBER

METHOD FOR FORMING A DECORATIVE COATING ON A GEMSTONE, A DECORATIVE...

METHOD FOR FORMING AN ELECTRICALLY CONDUCTIVE OXIDE FILM, AN ELECTR...

METHOD FOR FORMING A DECORATIVE COATING, A COATING, AND USES OF THE...

MULTILAYER COATING, METHOD FOR FABRICATING A MULTILAYER COATING, AN...

STRUCTURE COMPRISING AT LEAST ONE REFLECTING THIN-FILM ON A SURFACE...

ARRANGEMENT FOR PROCESSING SUBSTRATE AND SUBSTRATE CARRIER

METHOD AND APPARATUS FOR COATING

GAS DEPOSITION REACTOR

METHOD IN DEPOSITING METAL OXIDE MATERIALS

CONFORMAL COATINGS FOR MICRO-OPTICAL ELEMENTS

PRECURSOR MATERIAL DELIVERY SYSTEM WITH STAGING VOLUME FOR ATOMIC L...

PRECURSOR MATERIAL DELIVERY SYSTEM WITH THERMAL ENHANCEMENTS FOR AT...

DIAPHRAGM VALVE FOR ATOMIC LAYER DEPOSITION

Multilayer material and method of preparing same

High-speed diaphragm valve for atomic layer deposition

Diaphragm valve with reliability enhancements for atomic layer depo...

Diaphragm valve for high-temperature precursor supply in atomic lay...

Conformal coatings for micro-optical elements

Precursor material delivery system for atomic layer deposition