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Jasmine Lin
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San Jose, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Tungsten feature fill with nucleation inhibition
Patent number
11,437,269
Issue date
Sep 6, 2022
Novellus Systems, Inc.
Tsung-Han Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tungsten feature fill with nucleation inhibition
Patent number
10,381,266
Issue date
Aug 13, 2019
Novellus Systems, Inc.
Tsung-Han Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tungsten nitride barrier layer deposition
Patent number
10,199,267
Issue date
Feb 5, 2019
Lam Research Corporation
Rohit Khare
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PROCESS GAS RAMP DURING SEMICONDUCTOR PROCESSING
Publication number
20240376598
Publication date
Nov 14, 2024
LAM RESEARCH CORPORATION
Jasmine LIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
Publication number
20220359280
Publication date
Nov 10, 2022
Novellus Systems, Inc.
Tsung-Han YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
Publication number
20190326168
Publication date
Oct 24, 2019
Novellus Systems, Inc.
Tsung-Han Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TUNGSTEN NITRIDE BARRIER LAYER DEPOSITION
Publication number
20190006226
Publication date
Jan 3, 2019
LAM RESEARCH CORPORATION
Rohit Khare
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
Publication number
20170365513
Publication date
Dec 21, 2017
LAM RESEARCH CORPORATION
Tsung-Han Yang
H01 - BASIC ELECTRIC ELEMENTS