Jason Augustino

Person

Livermore, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
High-power radio-frequency spiral-coil filter
- Patent number 10,812,033
- Issue date Oct 20, 2020
- Lam Research Corporation
- Sean Kelly O'Brien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hollow RF feed with coaxial DC power feed
- Patent number 10,153,136
- Issue date Dec 11, 2018
- Lam Research Corporation
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing chamber with features from side wall
- Patent number 9,484,243
- Issue date Nov 1, 2016
- Lam Research Corporation
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lower electrode assembly of plasma processing chamber
- Patent number 9,412,555
- Issue date Aug 9, 2016
- Lam Research Corporation
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead electrode assembly with gas flow modification for extend...
- Patent number 9,093,483
- Issue date Jul 28, 2015
- Lam Research Corporation
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Upper electrode backing member with particle reducing features
- Patent number 8,709,202
- Issue date Apr 29, 2014
- Lam Research Corporation
- Anthony De La Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead electrode assembly with gas flow modification for extend...
- Patent number 8,702,866
- Issue date Apr 22, 2014
- Lam Research Corporation
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Quartz window for a degas chamber
- Patent number 8,603,292
- Issue date Dec 10, 2013
- Lam Research Corporation
- Jason Augustino
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Ozone plenum as UV shutter or tunable UV filter for cleaning semico...
- Patent number 8,492,736
- Issue date Jul 23, 2013
- Lam Research Corporation
- Yen-Kun Victor Wang
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Peripherally engaging electrode carriers and assemblies incorporati...
- Patent number 8,276,604
- Issue date Oct 2, 2012
- Lam Research Corporation
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning of bonded silicon electrodes
- Patent number 8,221,552
- Issue date Jul 17, 2012
- Lam Research Corporation
- Duane Outka
- B08 - CLEANING
Information Patent Grant
Methods and apparatus for wet cleaning electrode assemblies for pla...
- Patent number 8,215,321
- Issue date Jul 10, 2012
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Backside mounted electrode carriers and assemblies incorporating th...
- Patent number 8,171,877
- Issue date May 8, 2012
- Lam Research Corporation
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for wet cleaning electrode assemblies for pla...
- Patent number 7,942,973
- Issue date May 17, 2011
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Upper electrode backing member with particle reducing features
- Patent number 7,854,820
- Issue date Dec 21, 2010
- Lam Research Corporation
- Anthony De La Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning hardware kit for composite showerhead electrode assemblies...
- Patent number 7,767,028
- Issue date Aug 3, 2010
- Lam Research Corporation
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HIGH-POWER RADIO-FREQUENCY SPIRAL-COIL FILTER
- Publication number 20190207579
- Publication date Jul 4, 2019
- LAM RESEARCH CORPORATION
- Sean Kelly O'Brien
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
HOLLOW RF FEED WITH COAXIAL DC POWER FEED
- Publication number 20170040148
- Publication date Feb 9, 2017
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING CHAMBER WITH FEATURES FROM SIDE WALL
- Publication number 20150303085
- Publication date Oct 22, 2015
- LAM RESEARCH CORPORATION
- Dean J. LARSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANNULAR BAFFLE FOR PUMPING FROM ABOVE A PLANE OF THE SEMICONDUCTOR...
- Publication number 20150155187
- Publication date Jun 4, 2015
- LAM RESEARCH CORPORATION
- Iqbal Shareef
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ELECTRODE ASSEMBLY WITH GAS FLOW MODIFICATION FOR EXTEND...
- Publication number 20140187049
- Publication date Jul 3, 2014
- LAM RESEARCH CORPORATION
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OZONE PLENUM AS UV SHUTTER OR TUNABLE UV FILTER FOR CLEANING SEMICO...
- Publication number 20130288488
- Publication date Oct 31, 2013
- Yen-Kun Victor Wang
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...
- Publication number 20120013242
- Publication date Jan 19, 2012
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OZONE PLENUM AS UV SHUTTER OR TUNABLE UV FILTER FOR CLEANING SEMICO...
- Publication number 20110306213
- Publication date Dec 15, 2011
- LAM RESEARCH CORPORATION
- Yen-Kun Victor Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR WET CLEANING ELECTRODE ASSEMBLIES FOR PLA...
- Publication number 20110180117
- Publication date Jul 28, 2011
- LAM RESEARCH CORPORATION
- Hong Shih
- B08 - CLEANING
Information Patent Application
QUARTZ WINDOW FOR A DEGAS CHAMBER
- Publication number 20110097900
- Publication date Apr 28, 2011
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UPPER ELECTRODE BACKING MEMBER WITH PARTICLE REDUCING FEATURES
- Publication number 20110086513
- Publication date Apr 14, 2011
- LAM RESEARCH CORPORATION
- Anthony De La Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOWER ELECTRODE ASSEMBLY OF PLASMA PROCESSING CHAMBER
- Publication number 20100108261
- Publication date May 6, 2010
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERIPHERALLY ENGAGING ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATI...
- Publication number 20090321018
- Publication date Dec 31, 2009
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...
- Publication number 20090322199
- Publication date Dec 31, 2009
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning of bonded silicon electrodes
- Publication number 20080236618
- Publication date Oct 2, 2008
- LAM RESEARCH CORPORATION
- Duane Outka
- B08 - CLEANING
Information Patent Application
Cleaning hardware kit for composite showerhead electrode assemblies...
- Publication number 20080223401
- Publication date Sep 18, 2008
- LAM RESEARCH CORPORATION
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Showerhead electrode assembly with gas flow modification for extend...
- Publication number 20080141941
- Publication date Jun 19, 2008
- LAM RESEARCH CORPORATION
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for wet cleaning electrode assemblies for pla...
- Publication number 20080092920
- Publication date Apr 24, 2008
- LAM RESEARCH CORPORATION
- Hong Shih
- B08 - CLEANING
Information Patent Application
Upper electrode backing member with particle reducing features
- Publication number 20080090417
- Publication date Apr 17, 2008
- LAM RESEARCH CORPORATION
- Anthony De La Llera
- H01 - BASIC ELECTRIC ELEMENTS

Jason Augustino

Person

Patents Grantslast 30 patents

High-power radio-frequency spiral-coil filter

Hollow RF feed with coaxial DC power feed

Processing chamber with features from side wall

Lower electrode assembly of plasma processing chamber

Showerhead electrode assembly with gas flow modification for extend...

Upper electrode backing member with particle reducing features

Showerhead electrode assembly with gas flow modification for extend...

Quartz window for a degas chamber

Ozone plenum as UV shutter or tunable UV filter for cleaning semico...

Peripherally engaging electrode carriers and assemblies incorporati...

Cleaning of bonded silicon electrodes

Methods and apparatus for wet cleaning electrode assemblies for pla...

Backside mounted electrode carriers and assemblies incorporating th...

Methods and apparatus for wet cleaning electrode assemblies for pla...

Upper electrode backing member with particle reducing features

Cleaning hardware kit for composite showerhead electrode assemblies...

Patents Applicationslast 30 patents

HIGH-POWER RADIO-FREQUENCY SPIRAL-COIL FILTER

HOLLOW RF FEED WITH COAXIAL DC POWER FEED

PROCESSING CHAMBER WITH FEATURES FROM SIDE WALL

ANNULAR BAFFLE FOR PUMPING FROM ABOVE A PLANE OF THE SEMICONDUCTOR...

SHOWERHEAD ELECTRODE ASSEMBLY WITH GAS FLOW MODIFICATION FOR EXTEND...

OZONE PLENUM AS UV SHUTTER OR TUNABLE UV FILTER FOR CLEANING SEMICO...

BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...

OZONE PLENUM AS UV SHUTTER OR TUNABLE UV FILTER FOR CLEANING SEMICO...

METHODS AND APPARATUS FOR WET CLEANING ELECTRODE ASSEMBLIES FOR PLA...

QUARTZ WINDOW FOR A DEGAS CHAMBER

UPPER ELECTRODE BACKING MEMBER WITH PARTICLE REDUCING FEATURES

LOWER ELECTRODE ASSEMBLY OF PLASMA PROCESSING CHAMBER

PERIPHERALLY ENGAGING ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATI...

BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...

Cleaning of bonded silicon electrodes

Cleaning hardware kit for composite showerhead electrode assemblies...

Showerhead electrode assembly with gas flow modification for extend...

Methods and apparatus for wet cleaning electrode assemblies for pla...

Upper electrode backing member with particle reducing features