Jason Autustino

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Livermore, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Ozone plenum as UV shutter or tunable UV filter for cleaning semico...
- Patent number 8,624,210
- Issue date Jan 7, 2014
- Lam Research Corporation
- Yen-Kun Victor Wang
- C03 - GLASS MINERAL OR SLAG WOOL