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Jason M. Arcand
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Escondido, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Extreme ultraviolet light source
Patent number
10,064,261
Issue date
Aug 28, 2018
ASML Netherlands B.V.
Yezheng Tao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Metrology system for an extreme ultraviolet light source
Patent number
10,048,199
Issue date
Aug 14, 2018
ASML Netherlands B.V.
Jesse Quinn Odle
G01 - MEASURING TESTING
Information
Patent Grant
System and method for correcting the focus of a laser beam
Patent number
9,360,600
Issue date
Jun 7, 2016
ASML Netherlands B.V.
Christopher Paul Pate
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source
Patent number
9,357,625
Issue date
May 31, 2016
ASML Netherlands B.V.
Yezheng Tao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
System and method for separating a main pulse and a pre-pulse beam...
Patent number
8,681,427
Issue date
Mar 25, 2014
Cymer, Inc.
Robert A. Bergstedt
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE
Publication number
20160007434
Publication date
Jan 7, 2016
ASML NETHERLANDS B.V.
Yezheng Tao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
System and Method for Correcting the Focus of a Laser Beam
Publication number
20150137011
Publication date
May 21, 2015
CYMER, LLC
Christopher Paul Pate
G02 - OPTICS
Information
Patent Application
System and Method for Separating a Main Pulse and a Pre-Pulse Beam...
Publication number
20130321926
Publication date
Dec 5, 2013
Cymer, Inc.
Robert A. Bergstedt
G02 - OPTICS