Jason MARION

Person

Glenville, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for stability monitoring and improvements to plasma sources...
- Patent number 10,818,482
- Issue date Oct 27, 2020
- Tokyo Electron Limited
- Yusuke Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of plasma discharge ignition to reduce surface pa...
- Patent number 10,818,502
- Issue date Oct 27, 2020
- Tokyo Electron Limited
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operation instability detection in a surface wave plasma...
- Patent number 10,651,017
- Issue date May 12, 2020
- Tokyo Electron Limited
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual-frequency surface wave plasma source
- Patent number 10,083,820
- Issue date Sep 25, 2018
- Tokyo Electron Limited
- Sergey A. Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for ESC charge control for wafer clamping
- Patent number 9,530,626
- Issue date Dec 27, 2016
- Tokyo Electron Limited
- Jason Marion
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THE SAME
- Publication number 20250006504
- Publication date Jan 2, 2025
- TOKYO ELECTRON LIMITED
- Jason MARION
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Etching Features in a Layer in a Substrate
- Publication number 20240234158
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Indroneil Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR STABILITY MONITORING AND IMPROVEMENTS TO PLASMA SOURCES...
- Publication number 20200105510
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Yusuke Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHODS TO REDUCE SURFACE PARTICLE IMPURITIES AFTER A...
- Publication number 20180323045
- Publication date Nov 8, 2018
- TOKYO ELECTRON LIMITED
- Jason Marion
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PLASMA DISCHARGE IGNITION TO REDUCE SURFACE PARTICLES
- Publication number 20180144946
- Publication date May 24, 2018
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL-FREQUENCY SURFACE WAVE PLASMA SOURCE
- Publication number 20180138018
- Publication date May 17, 2018
- TOKYO ELECTRON LIMITED
- Sergey A. Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATION INSTABILITY DETECTION IN A SURFACE WAVE PLASMA...
- Publication number 20180005805
- Publication date Jan 4, 2018
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR ESC CHARGE CONTROL FOR WAFER CLAMPING
- Publication number 20160027620
- Publication date Jan 28, 2016
- TOKYO ELECTRON LIMITED
- Jason MARION
- H01 - BASIC ELECTRIC ELEMENTS

Jason MARION

Person

Patents Grantslast 30 patents

Methods for stability monitoring and improvements to plasma sources...

System and method of plasma discharge ignition to reduce surface pa...

Method for operation instability detection in a surface wave plasma...

Dual-frequency surface wave plasma source

Method and apparatus for ESC charge control for wafer clamping

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THE SAME

Method for Etching Features in a Layer in a Substrate

METHODS FOR STABILITY MONITORING AND IMPROVEMENTS TO PLASMA SOURCES...

MANUFACTURING METHODS TO REDUCE SURFACE PARTICLE IMPURITIES AFTER A...

METHOD OF PLASMA DISCHARGE IGNITION TO REDUCE SURFACE PARTICLES

DUAL-FREQUENCY SURFACE WAVE PLASMA SOURCE

METHOD FOR OPERATION INSTABILITY DETECTION IN A SURFACE WAVE PLASMA...

METHOD AND APPARATUS FOR ESC CHARGE CONTROL FOR WAFER CLAMPING