Jason Paxton

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San Diego, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
EUV light producing system and method utilizing an alignment laser
- Patent number 8,304,752
- Issue date Nov 6, 2012
- Cymer, Inc.
- Igor V. Fomenkov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Systems and methods for drive laser beam delivery in an EUV light s...
- Patent number 8,283,643
- Issue date Oct 9, 2012
- Cymer, Inc.
- William N. Partlo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Alignment Laser
- Publication number 20100327192
- Publication date Dec 30, 2010
- CYMER INC.
- Igor V. Fomenkov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Systems and methods for drive laser beam delivery in an euv light s...
- Publication number 20100127191
- Publication date May 27, 2010
- Cymer, Inc.
- William N. Partlo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR