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Jasper Leonardus Johannes SCHOLTEN
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Borne, NL
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last 30 patents
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Patent Grant
Object stage bearing for lithographic apparatus
Patent number
11,442,369
Issue date
Sep 13, 2022
ASML Netherlands B.V.
Yang-Shan Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Object Stage Bearing for Lithographic Apparatus
Publication number
20200333717
Publication date
Oct 22, 2020
ASML NETHERLANDS B.V.
Yang-Shan HUANG
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...