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Jatinder Kumar
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Fremont, CA, US
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last 30 patents
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Patent Grant
Adjustable side gas plenum for edge rate control in a downstream re...
Patent number
10,622,189
Issue date
Apr 14, 2020
Lam Research Corporation
Andrew Stratton Bravo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
SYSTEMS AND METHODS FOR PLASMA-LESS DE-HALOGENATION
Publication number
20190051540
Publication date
Feb 14, 2019
LAM RESEARCH CORPORATION
Ji Zhu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ADJUSTABLE SIDE GAS PLENUM FOR EDGE RATE CONTROL IN A DOWNSTREAM RE...
Publication number
20170330728
Publication date
Nov 16, 2017
LAM RESEARCH CORPORATION
Andrew Stratton Bravo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...