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Chip shuttle track
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Patent number 4,395,165
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Issue date Jul 26, 1983
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International Business Machine Corp.
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I. Joseph DeRobertis
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B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
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Gas film wafer transportation system
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Patent number 4,348,139
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Issue date Sep 7, 1982
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International Business Machines Corp.
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Javathu K. Hassan
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B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
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Contactless air film lifting device
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Patent number 4,257,637
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Issue date Mar 24, 1981
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International Business Machines Corporation
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Javathu K. Hassan
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B66 - HOISTING LIFTING HAULING
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Wafer air film transportation system
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Patent number 4,081,201
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Issue date Mar 28, 1978
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International Business Machines Corporation
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Javathu Kutikaran Hassan
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B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
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Workpiece positioning apparatus
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Patent number 4,042,119
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Issue date Aug 16, 1977
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International Business Machines Corporation
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Javathu Kutikaran Hassan
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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