Jaw-Jung Shin

Person

HsinChu City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Methods of manufacturing semiconductor device using phase shift mask
- Patent number 11,670,541
- Issue date Jun 6, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Chieh Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of manufacturing redistribution circuit structures using ph...
- Patent number 11,189,521
- Issue date Nov 30, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Chieh Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for charged particle lithography system
- Patent number 9,911,575
- Issue date Mar 6, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Chi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for high-throughput and small-footprint scannin...
- Patent number 9,810,994
- Issue date Nov 7, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Grid refinement method
- Patent number 9,678,434
- Issue date Jun 13, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for EUV power improvement with fuel droplet trajectory stabi...
- Patent number 9,538,628
- Issue date Jan 3, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsiao-Chen Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Grid refinement method
- Patent number 9,529,271
- Issue date Dec 27, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for high-throughput and small-footprint scannin...
- Patent number 9,519,225
- Issue date Dec 13, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for charged particle lithography system
- Patent number 9,390,891
- Issue date Jul 12, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Chi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Grid refinement method
- Patent number 9,329,488
- Issue date May 3, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern generator for a lithography system
- Patent number 9,291,913
- Issue date Mar 22, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Hua Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for high-throughput and small-footprint scannin...
- Patent number 9,229,332
- Issue date Jan 5, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods for electron beam patterning
- Patent number 9,182,660
- Issue date Nov 10, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Grid refinement method
- Patent number 9,176,389
- Issue date Nov 3, 2015
- Taiwan Semiconductor Manfacturing Company, Ltd.
- Wen-Chuan Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for image dithering for lithographic processes
- Patent number 9,147,377
- Issue date Sep 29, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Hung Chen
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Multiple-patterning overlay decoupling method
- Patent number 9,134,627
- Issue date Sep 15, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern generator for a lithography system
- Patent number 9,001,308
- Issue date Apr 7, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Hua Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Long-range lithographic dose correction
- Patent number 8,984,452
- Issue date Mar 17, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Hung Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for electron beam proximity correction with improved critica...
- Patent number 8,972,908
- Issue date Mar 3, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Hung Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods providing electron beam writing to a medium
- Patent number 8,927,947
- Issue date Jan 6, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam lithography system and method for improving throughput
- Patent number 8,852,849
- Issue date Oct 7, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jaw-Jung Shin
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Electron beam lithography system and method for improving throughput
- Patent number 8,846,278
- Issue date Sep 30, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jaw-Jung Shin
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Multiple-grid exposure method
- Patent number 8,828,632
- Issue date Sep 9, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Grid refinement method
- Patent number 8,822,107
- Issue date Sep 2, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Grid refinement method
- Patent number 8,822,106
- Issue date Sep 2, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for proximity correction
- Patent number 8,762,900
- Issue date Jun 24, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jaw-Jung Shin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Devices and methods for improved reflective electron beam lithography
- Patent number 8,722,286
- Issue date May 13, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Hua Yu
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Systems and methods providing electron beam writing to a medium
- Patent number 8,610,083
- Issue date Dec 17, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Non-directional dithering methods
- Patent number 8,584,057
- Issue date Nov 12, 2013
- Taiwan Semiconductor Manufacturing Copmany, Ltd.
- Pei-Yi Liu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multiple-grid exposure method
- Patent number 8,530,121
- Issue date Sep 10, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen Chuan Wang
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF MANUFACTURING SEMICONDUCTOR DEVICE USING PHASE SHIFT MASK
- Publication number 20220084874
- Publication date Mar 17, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Chieh Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF MANUFACTURING REDISTRIBUTION CIRCUIT STRUCTURES
- Publication number 20200135543
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Chieh Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GRID REFINEMENT METHOD
- Publication number 20170102624
- Publication date Apr 13, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR HIGH-THROUGHPUT AND SMALL-FOOTPRINT SCANNIN...
- Publication number 20170082926
- Publication date Mar 23, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR EUV POWER IMPROVEMENT WITH FUEL DROPLET TRAJECTORY STABI...
- Publication number 20160366756
- Publication date Dec 15, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsiao-Chen Wu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Apparatus for Charged Particle Lithography System
- Publication number 20160322199
- Publication date Nov 3, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Chi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Grid Refinement Method
- Publication number 20160246912
- Publication date Aug 25, 2016
- Wen-Chuan Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR HIGH-THROUGHPUT AND SMALL-FOOTPRINT SCANNIN...
- Publication number 20160091795
- Publication date Mar 31, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Grid Refinement Method
- Publication number 20160055291
- Publication date Feb 25, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Apparatus for Charged Particle Lithography System
- Publication number 20160049278
- Publication date Feb 18, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Chi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern Generator For A Lithography System
- Publication number 20150212423
- Publication date Jul 30, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Hua Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR HIGH-THROUGHPUT AND SMALL-FOOTPRINT SCANNIN...
- Publication number 20150077731
- Publication date Mar 19, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LONG-RANGE LITHOGRAPHIC DOSE CORRECTION
- Publication number 20150052489
- Publication date Feb 19, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Hung Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for Image Dithering
- Publication number 20150035851
- Publication date Feb 5, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Hung Chen
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
Method for Electron Beam Proximity Correction with Improved Critica...
- Publication number 20150040079
- Publication date Feb 5, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Hung Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Grid Refinement Method
- Publication number 20140368806
- Publication date Dec 18, 2014
- Wen-Chuan Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS PROVIDING ELECTRON BEAM WRITING TO A MEDIUM
- Publication number 20140217305
- Publication date Aug 7, 2014
- Wen-Chuan Wang
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR PROXIMITY CORRECTION
- Publication number 20140007023
- Publication date Jan 2, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jaw-Jung Shin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTIPLE-GRID EXPOSURE METHOD
- Publication number 20140004468
- Publication date Jan 2, 2014
- Wen-Chuan Wang
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electron Beam Lithography System and Method for Improving Throughput
- Publication number 20130330670
- Publication date Dec 12, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jaw-Jung Shin
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electron Beam Lithography System and Method For Improving Throughput
- Publication number 20130327962
- Publication date Dec 12, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jaw-Jung Shin
- B82 - NANO-TECHNOLOGY
Information Patent Application
DEVICES AND METHODS FOR IMPROVED REFLECTIVE ELECTRON BEAM LITHOGRAPHY
- Publication number 20130320225
- Publication date Dec 5, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Hua Yu
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHODS FOR ELECTRON BEAM PATTERNING
- Publication number 20130323918
- Publication date Dec 5, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Grid Refinement Method
- Publication number 20130273475
- Publication date Oct 17, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Grid Refinement Method
- Publication number 20130273474
- Publication date Oct 17, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ERROR DIFFUSION AND GRID SHIFT IN LITHOGRAPHY
- Publication number 20130232455
- Publication date Sep 5, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pei-Yi Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NON-DIRECTIONAL DITHERING METHODS
- Publication number 20130232453
- Publication date Sep 5, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pei-Yi Liu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Multiple-Grid Exposure Method
- Publication number 20130203001
- Publication date Aug 8, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- B82 - NANO-TECHNOLOGY
Information Patent Application
Multiple-Patterning Overlay Decoupling Method
- Publication number 20130157389
- Publication date Jun 20, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS PROVIDING ELECTRON BEAM WRITING TO A MEDIUM
- Publication number 20130146780
- Publication date Jun 13, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- B82 - NANO-TECHNOLOGY

Jaw-Jung Shin

Person

Patents Grantslast 30 patents

Methods of manufacturing semiconductor device using phase shift mask

Methods of manufacturing redistribution circuit structures using ph...

Apparatus for charged particle lithography system

Systems and methods for high-throughput and small-footprint scannin...

Grid refinement method

Method for EUV power improvement with fuel droplet trajectory stabi...

Grid refinement method

Systems and methods for high-throughput and small-footprint scannin...

Apparatus for charged particle lithography system

Grid refinement method

Pattern generator for a lithography system

Systems and methods for high-throughput and small-footprint scannin...

Methods for electron beam patterning

Grid refinement method

Method for image dithering for lithographic processes

Multiple-patterning overlay decoupling method

Pattern generator for a lithography system

Long-range lithographic dose correction

Method for electron beam proximity correction with improved critica...

Systems and methods providing electron beam writing to a medium

Electron beam lithography system and method for improving throughput

Electron beam lithography system and method for improving throughput

Multiple-grid exposure method

Grid refinement method

Grid refinement method

Method for proximity correction

Devices and methods for improved reflective electron beam lithography

Systems and methods providing electron beam writing to a medium

Non-directional dithering methods

Multiple-grid exposure method

Patents Applicationslast 30 patents

METHODS OF MANUFACTURING SEMICONDUCTOR DEVICE USING PHASE SHIFT MASK

METHODS OF MANUFACTURING REDISTRIBUTION CIRCUIT STRUCTURES

GRID REFINEMENT METHOD

SYSTEMS AND METHODS FOR HIGH-THROUGHPUT AND SMALL-FOOTPRINT SCANNIN...

METHOD FOR EUV POWER IMPROVEMENT WITH FUEL DROPLET TRAJECTORY STABI...

Apparatus for Charged Particle Lithography System

Grid Refinement Method

SYSTEMS AND METHODS FOR HIGH-THROUGHPUT AND SMALL-FOOTPRINT SCANNIN...

Grid Refinement Method

Apparatus for Charged Particle Lithography System

Pattern Generator For A Lithography System

SYSTEMS AND METHODS FOR HIGH-THROUGHPUT AND SMALL-FOOTPRINT SCANNIN...

LONG-RANGE LITHOGRAPHIC DOSE CORRECTION

Method for Image Dithering

Method for Electron Beam Proximity Correction with Improved Critica...

Grid Refinement Method

SYSTEMS AND METHODS PROVIDING ELECTRON BEAM WRITING TO A MEDIUM

METHOD FOR PROXIMITY CORRECTION

MULTIPLE-GRID EXPOSURE METHOD

Electron Beam Lithography System and Method for Improving Throughput

Electron Beam Lithography System and Method For Improving Throughput

DEVICES AND METHODS FOR IMPROVED REFLECTIVE ELECTRON BEAM LITHOGRAPHY

METHODS FOR ELECTRON BEAM PATTERNING

Grid Refinement Method

Grid Refinement Method

ERROR DIFFUSION AND GRID SHIFT IN LITHOGRAPHY

NON-DIRECTIONAL DITHERING METHODS

Multiple-Grid Exposure Method

Multiple-Patterning Overlay Decoupling Method

SYSTEMS AND METHODS PROVIDING ELECTRON BEAM WRITING TO A MEDIUM