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Jayakumar PACHAIYAPPAN
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Singapore, SG
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Patents Grants
last 30 patents
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Patent Grant
Chemical mechanical polishing (CMP) polishing head with improved va...
Patent number
11,541,506
Issue date
Jan 3, 2023
Systems on Silicon Manufacturing Company Pte. Ltd.
Jayakumar Pachaiyappan
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
CHEMICAL MECHANICAL POLISHING (CMP) POLISHING HEAD WITH IMPROVED VA...
Publication number
20210094146
Publication date
Apr 1, 2021
Systems on Silicon Manufacturing Co. PTE. LTD.
Jayakumar PACHAIYAPPAN
B24 - GRINDING POLISHING