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J.David Casey, JR.
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West Roxbury, MA, US
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Patents Grants
last 30 patents
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Patent Grant
Electron beam processing for mask repair
Patent number
7,727,681
Issue date
Jun 1, 2010
FEI Company
Diane K. Stewart
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Photolithography mask repair
Patent number
7,662,524
Issue date
Feb 16, 2010
FEI Company
Diane K. Stewart
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
PHOTOLITHOGRAPHY MASK REPAIR
Publication number
20090111036
Publication date
Apr 30, 2009
FEI Company
Diane K. Stewart
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY