Membership
Tour
Register
Log in
Je-Hun WOO
Follow
Person
Suwon-si, KR
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Antennas, circuits for generating plasma, plasma processing apparat...
Patent number
10,971,333
Issue date
Apr 6, 2021
Samsung Electronics Co., Ltd.
Dong-Hyub Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of fabricating semiconductor devices including performing a...
Patent number
9,691,618
Issue date
Jun 27, 2017
Samsung Electronics Co., Ltd.
Dougyong Sung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma apparatus and method of fabricating semiconductor device usi...
Patent number
9,490,107
Issue date
Nov 8, 2016
Samsung Electronics Co., Ltd.
Moojin Kim
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ANTENNAS, CIRCUITS FOR GENERATING PLASMA, PLASMA PROCESSING APPARAT...
Publication number
20210183618
Publication date
Jun 17, 2021
Samsung Electronics Co., Ltd.
Dong-Hyub LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTO...
Publication number
20180366304
Publication date
Dec 20, 2018
Samsung Electronics Co., Ltd.
Seung Bo SHIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Antennas, Circuits for Generating Plasma, Plasma Processing Apparat...
Publication number
20180114675
Publication date
Apr 26, 2018
Samsung Electronics Co., Ltd.
Dong-Hyub LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ATOMIC LAYER ETCHING AND METHOD OF FABRICATING SEMICONDUC...
Publication number
20180114700
Publication date
Apr 26, 2018
Samsung Electronics Co., Ltd.
Je-Hun WOO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20170330734
Publication date
Nov 16, 2017
Samsung Electronics Co., Ltd.
Jun-soo LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA SYSTEM, PLASMA PROCESSING METHOD, AND PLASMA ETCHING METHOD
Publication number
20170186586
Publication date
Jun 29, 2017
Samsung Electronics Co., Ltd.
Sejin Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF FABRICATING SEMICONDUCTOR DEVICES INCLUDING PERFORMING A...
Publication number
20170140937
Publication date
May 18, 2017
Samsung Electronics Co., Ltd.
Dougyong SUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA APPARATUS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USI...
Publication number
20150325413
Publication date
Nov 12, 2015
MOOJIN KIM
H01 - BASIC ELECTRIC ELEMENTS