Je-Kwan Yeon

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Gyeonggi-do, KR

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Patents Applicationslast 30 patents

Information Patent Application
ATOMIC LAYER ETCHING APPARATUS AND ETCHING METHOD USING THE SAME
- Publication number 20110192820
- Publication date Aug 11, 2011
- SUNGKYUNKWAN UNIVERSITY FOUNDATION FOR CORPORATE COLLABORATION
- Geun-Young Yeom
- H01 - BASIC ELECTRIC ELEMENTS