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Jean Barreiro
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Palaiseau, FR
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Patents Grants
last 30 patents
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Patent Grant
RF plasma reactor having a distribution chamber with at least one grid
Patent number
9,045,828
Issue date
Jun 2, 2015
TEL Solar AG
Emmanuel Turlot
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
RF plasma reactor having a distribution chamber with at least one grid
Patent number
7,306,829
Issue date
Dec 11, 2007
Unaxis Balzers Aktiengesellschaft
Emmanuel Turlot
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Design of gas injection for the electrode in a capacitively coupled...
Patent number
6,502,530
Issue date
Jan 7, 2003
Unaxis Balzers Aktiengesellschaft
Emmanuel Turlot
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
RF Plasma Reactor Having a Distribution Chamber with at Least One Grid
Publication number
20080093341
Publication date
Apr 24, 2008
Unaxis Balzers Aktiengesellschaft
Emmanuel Turlot
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RF plasma reactor
Publication number
20030070761
Publication date
Apr 17, 2003
UNAXIS BALZERS AKTIENGESELLSCHAFT
Emmanuel Turlot
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...