Jean-Charles Cigal

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Bielefeld, DE

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Patents Applicationslast 30 patents

Information Patent Application
CHEMICAL VAPOR DEPOSITION CHAMBER CLEANING WITH MOLECULAR FLUORINE
- Publication number 20130276820
- Publication date Oct 24, 2013
- Jean-Charles Cigal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION CHAMBER CLEANING USING IN SITU ACTIVATION OF MOLECULAR F...
- Publication number 20130239988
- Publication date Sep 19, 2013
- Jean-Charles Cigal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR BOX CHAMBER CLEANING USING MOLECULAR FLUORINE
- Publication number 20130220364
- Publication date Aug 29, 2013
- Jean-Charles Cigal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...