Jean-François Daviet

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Cran-Gervrier, FR

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning process for rapid thermal processing system
- Patent number 6,236,023
- Issue date May 22, 2001
- Mattson Technology, Inc.
- Stephen E. Savas
- C30 - CRYSTAL GROWTH
Information Patent Grant
Model based method for wafer temperature control in a thermal proce...
- Patent number 6,169,271
- Issue date Jan 2, 2001
- Mattson Technology, Inc.
- Stephen E. Savas
- C30 - CRYSTAL GROWTH