Jean Lu

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for depositing high quality PVD films
- Patent number 11,802,349
- Issue date Oct 31, 2023
- Applied Materials, Inc.
- Zihao Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for physical vapor deposition using an open to...
- Patent number 6,613,199
- Issue date Sep 2, 2003
- Novellus Systems, Inc.
- Jeffrey A. Tobin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pasting method for eliminating flaking during nitride sputtering
- Patent number 6,589,398
- Issue date Jul 8, 2003
- Novellus Systems, Inc.
- Jean Qing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for improving film uniformity in a physical va...
- Patent number 6,471,831
- Issue date Oct 29, 2002
- Novellus Systems, Inc.
- Jean Qing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for reducing redeposition in a physical vapor...
- Patent number 6,468,404
- Issue date Oct 22, 2002
- Novellus Systems, Inc.
- Jean Qing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD deposition of titanium and titanium nitride layers in the same...
- Patent number 6,342,133
- Issue date Jan 29, 2002
- Novellus Systems, Inc.
- Gerard Chris D'Couto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Tungsten Fluoride Soak And Treatment For Tungsten Oxide Removal
- Publication number 20230187204
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Xiaodong Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DEPOSITING HIGH QUALITY PVD FILMS
- Publication number 20210123156
- Publication date Apr 29, 2021
- Applied Materials, Inc.
- Zihao YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for reducing redeposition in a physical vapor...
- Publication number 20020096427
- Publication date Jul 25, 2002
- Jean Qing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for improving film uniformity in a physical va...
- Publication number 20020088711
- Publication date Jul 11, 2002
- Jean Qing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD deposition of titanium and titanium nitride layers in the same...
- Publication number 20010030125
- Publication date Oct 18, 2001
- Gerard Chris D'Couto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Method for depositing high quality PVD films

Apparatus and method for physical vapor deposition using an open to...

Pasting method for eliminating flaking during nitride sputtering

Apparatus and method for improving film uniformity in a physical va...

Apparatus and method for reducing redeposition in a physical vapor...

PVD deposition of titanium and titanium nitride layers in the same...

Patents Applicationslast 30 patents

Tungsten Fluoride Soak And Treatment For Tungsten Oxide Removal

METHOD FOR DEPOSITING HIGH QUALITY PVD FILMS

Apparatus and method for reducing redeposition in a physical vapor...

Apparatus and method for improving film uniformity in a physical va...

PVD deposition of titanium and titanium nitride layers in the same...