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Jean-Marc Girard
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Tsukuba, JP
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last 30 patents
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Patent Grant
Copper source liquid for MOCVD processes and method for the prepara...
Patent number
6,656,255
Issue date
Dec 2, 2003
L'Air Liquide Societe Anonyme A Directoire et Conseil de Surveillance pour l'...
Akinobu Nasu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
COPPER SOURCE LIQUID FOR MOCVD PROCESSES AND METHOD FOR THE PREPARA...
Publication number
20030183121
Publication date
Oct 2, 2003
Akinobu Nasu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Method and apparatus for the distribution of treatment liquids
Publication number
20020043488
Publication date
Apr 18, 2002
Olivier Letessier
G05 - CONTROLLING REGULATING