Jean-Marc Girard

Person

Versailles, FR

People

Patents Grantslast 30 patents

Information Patent Grant
Silicon-based self-assembling monolayer compositions and surface pr...
- Patent number 12,187,853
- Issue date Jan 7, 2025
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Venkateswara R. Pallem
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Group 6 transition metal-containing compositions for vapor depositi...
- Patent number 12,173,403
- Issue date Dec 24, 2024
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Rocio Alejandra Arteaga Muller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reagents to remove oxygen from metal oxyhalide precursors in thin f...
- Patent number 11,821,080
- Issue date Nov 21, 2023
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Yumin Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Si-containing film forming precursors and methods of using the same
- Patent number 11,820,654
- Issue date Nov 21, 2023
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Jean-Marc Girard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Preprocessing method for solid material, and solid material product...
- Patent number 11,806,677
- Issue date Nov 7, 2023
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Kohei Tarutani
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Perhydropolysilazane compositions and methods for forming oxide fil...
- Patent number 11,739,220
- Issue date Aug 29, 2023
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Antonio Sanchez
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Si-containing film forming precursors and methods of using the same
- Patent number 11,699,584
- Issue date Jul 11, 2023
- L'Air Liquide, Société Anonyme pour l'Edute ed l'Exploitation des Procédés Ge...
- Jean-Marc Girard
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Tungsten pentachloride conditioning and crystalline phase manipulation
- Patent number 11,577,967
- Issue date Feb 14, 2023
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Feng Li
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Cureable formulations for forming low-k dielectric silicon-containi...
- Patent number 11,499,014
- Issue date Nov 15, 2022
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Yumin Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Ultra-low temperature ALD to form high-quality Si-containing film
- Patent number 11,482,414
- Issue date Oct 25, 2022
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Naoto Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Si-containing film forming compositions and methods of making and u...
- Patent number 11,407,922
- Issue date Aug 9, 2022
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Manish Khandelwal
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Area selective deposition of metal containing films
- Patent number 11,319,449
- Issue date May 3, 2022
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Wontae Noh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Catalytic reduction of halogenated carbosilanes and halogenated car...
- Patent number 11,261,202
- Issue date Mar 1, 2022
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Manish Khandelwal
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Lanthanide precursors and deposition of lanthanide-containing films...
- Patent number 11,242,597
- Issue date Feb 8, 2022
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Satoko Gatineau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
N—H free and Si-rich per-hydridopolysilzane compositions, their syn...
- Patent number 11,203,528
- Issue date Dec 21, 2021
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Antonio Sanchez
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Ge-containing Co-film forming material, Ge-containing Co film and f...
- Patent number 11,205,573
- Issue date Dec 21, 2021
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Rocio Alejandra Arteaga Muller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium-containing film forming compositions for vapor deposition...
- Patent number 11,168,099
- Issue date Nov 9, 2021
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Antonio Sanchez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Si-containing film forming precursors and methods of using the same
- Patent number 11,124,876
- Issue date Sep 21, 2021
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Jean-Marc Girard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tungsten pentachloride conditioning and crystalline phase manipulation
- Patent number 11,066,310
- Issue date Jul 20, 2021
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Feng Li
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Group 6 transition metal-containing compositions for vapor depositi...
- Patent number 11,021,793
- Issue date Jun 1, 2021
- L'Air Liquide, Société Anonyme pour I'Etude et I'Exploitation des Procédés Ge...
- Rocio Arteaga
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Methods for vapor deposition of group 4 transition metal-containing...
- Patent number 11,008,351
- Issue date May 18, 2021
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Ziyun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tungsten pentachloride conditioning and crystalline phase manipulation
- Patent number 10,899,630
- Issue date Jan 26, 2021
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Feng Li
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Zirconium, hafnium, titanium precursors and deposition of group 4 c...
- Patent number 10,895,012
- Issue date Jan 19, 2021
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Satoko Gatineau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Preparation of Si-H containing iodosilanes via halide exchange reac...
- Patent number 10,800,661
- Issue date Oct 13, 2020
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Cole Ritter
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Tungsten pentachloride conditioning and crystalline phase manipulation
- Patent number 10,710,896
- Issue date Jul 14, 2020
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Feng Li
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Titanium-containing film forming compositions for vapor deposition...
- Patent number 10,689,405
- Issue date Jun 23, 2020
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Antonio Sanchez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heterogeneous wet synthesis process for preparation of high purity...
- Patent number 10,669,160
- Issue date Jun 2, 2020
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Yumin Liu
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Etching reactants and plasma-free etching processes using the same
- Patent number 10,648,087
- Issue date May 12, 2020
- L'Air Liquide, SociétéAnonyme pour l'Exploitation et l'Etude des Procédés Geo...
- Clément Lansalot-Matras
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
N—H free and SI-rich per-hydridopolysilzane compositions, their syn...
- Patent number 10,647,578
- Issue date May 12, 2020
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Antonio Sanchez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium-containing film forming compositions for vapor deposition...
- Patent number 10,584,039
- Issue date Mar 10, 2020
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Antonio Sanchez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING A RUTHENIUM-CONTAINING LAYER AND LAMINATE
- Publication number 20240384400
- Publication date Nov 21, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Rocio Alejandra ARTEAGA MULLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOLYBDENUM PENTACHLORIDE CONDITIONING AND CRYSTALLINE PHASE MANIPUL...
- Publication number 20240344235
- Publication date Oct 17, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Feng LI
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF FORMING A CONFORMAL AND CONTINUOUS CRYSTALLINE SILICON NA...
- Publication number 20240222114
- Publication date Jul 4, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Claudia Fafard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON-BASED SELF-ASSEMBLING MONOLAYER COMPOSITIONS AND SURFACE PR...
- Publication number 20230331926
- Publication date Oct 19, 2023
- American Air Liquide, Inc.
- Venkateswara R. PALLEM
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
SELECTIVE THERMAL ETCHING METHODS OF METAL OR METAL-CONTAINING MATE...
- Publication number 20230274947
- Publication date Aug 31, 2023
- American Air Liquide, Inc.
- Rocio Alejandra ARTEAGA MULLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICES HAVING A RARE EARTH (OXY) FLUORIDE COATING FOR IMPROVED RES...
- Publication number 20230272524
- Publication date Aug 31, 2023
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Takashi TERAMOTO
- C01 - INORGANIC CHEMISTRY
Information Patent Application
CURABLE FORMULATIONS FOR FORMING LOW-k DIELECTRIC SILICON-CONTAININ...
- Publication number 20230095074
- Publication date Mar 30, 2023
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Yumin LIU
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SOLID MATERIAL CONTAINER AND SOLID MATERIAL PRODUCT WITH SOLID MATE...
- Publication number 20220349054
- Publication date Nov 3, 2022
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des Procedes Ge...
- Kohei TARUTANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SI-CONTAINING FILM FORMING PRECURSORS AND METHODS OF USING THE SAME
- Publication number 20210395890
- Publication date Dec 23, 2021
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Jean-Marc GIRARD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REAGENTS TO REMOVE OXYGEN FROM METAL OXYHALIDE PRECURSORS IN THIN F...
- Publication number 20210277517
- Publication date Sep 9, 2021
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Yumin Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROUP 6 TRANSITION METAL-CONTAINING COMPOSITIONS FOR VAPOR DEPOSITI...
- Publication number 20210246553
- Publication date Aug 12, 2021
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Rocio ARTEAGA
- C07 - ORGANIC CHEMISTRY
Information Patent Application
METHODS FOR VAPOR DEPOSITION OF GROUP 4 TRANSITION METAL-CONTAINING...
- Publication number 20210221830
- Publication date Jul 22, 2021
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Ziyun WANGQ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Si-CONTAINING FILM FORMING PRECURSORS AND METHODS OF USING THE SAME
- Publication number 20210225635
- Publication date Jul 22, 2021
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Jean-Marc GIRARD
- C01 - INORGANIC CHEMISTRY
Information Patent Application
CUREABLE FORMULATIONS FOR FORMING LOW-k DIELECTRIC SILICON-CONTAINI...
- Publication number 20210198429
- Publication date Jul 1, 2021
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Yumin LIU
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Area selective deposition of metal containing films
- Publication number 20210189146
- Publication date Jun 24, 2021
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Wontae NOH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNGSTEN PENTACHLORIDE CONDITIONING AND CRYSTALLINE PHASE MANIPULATION
- Publication number 20210114894
- Publication date Apr 22, 2021
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Esploitaion des Procedes Geo...
- Feng LI
- C01 - INORGANIC CHEMISTRY
Information Patent Application
PREPROCESSING METHOD FOR SOLID MATERIAL, AND SOLID MATERIAL PRODUCT...
- Publication number 20210101089
- Publication date Apr 8, 2021
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Kohei TARUTANI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PERHYDROPOLYSILAZANE COMPOSITIONS AND METHODS FOR FORMING NITRIDE F...
- Publication number 20210102092
- Publication date Apr 8, 2021
- American Air Liquide, Inc.
- Antonio SANCHEZ
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
PERHYDROPOLYSILAZANE COMPOSITIONS AND METHODS FOR FORMING OXIDE FIL...
- Publication number 20210087406
- Publication date Mar 25, 2021
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Antonio SANCHEZ
- C01 - INORGANIC CHEMISTRY
Information Patent Application
CATALYTIC REDUCTION OF HALOGENATED CARBOSILANES AND HALOGENATED CAR...
- Publication number 20210087209
- Publication date Mar 25, 2021
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Manish KHANDELWAL
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CYCLIC GERMANIUM SILYLAMIDO PRECURSORS FOR GE-CONTAINING FILM DEPOS...
- Publication number 20210032275
- Publication date Feb 4, 2021
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Naohisa NAKAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREPARATION OF SI-H CONTAINING IODOSILANES VIA HALIDE EXCHANGE REAC...
- Publication number 20200407228
- Publication date Dec 31, 2020
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Cole RITTER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRA-LOW TEMPERATURE ALD TO FORM HIGH-QUALITY SI-CONTAINING FILM
- Publication number 20200373148
- Publication date Nov 26, 2020
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Naoto NODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALKYLAMINO-SUBSTITUTED CARBOSILANE PRECURSORS
- Publication number 20200339610
- Publication date Oct 29, 2020
- American Air Liquid, Inc.
- Claudia FAFARD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HETEROGENEOUS WET SYNTHESIS PROCESS FOR PREPARATION OF HIGH PURITY...
- Publication number 20200325036
- Publication date Oct 15, 2020
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Yumin LIU
- C01 - INORGANIC CHEMISTRY
Information Patent Application
TUNGSTEN PENTACHLORIDE CONDITIONING AND CRYSTALLINE PHASE MANIPULATION
- Publication number 20200299147
- Publication date Sep 24, 2020
- L'Air Liquide, Societe Anonyme pour l'Exploitation des Procedes Georges Claude
- Feng LI
- C30 - CRYSTAL GROWTH
Information Patent Application
TITANIUM-CONTAINING FILM FORMING COMPOSITIONS FOR VAPOR DEPOSITION...
- Publication number 20200277315
- Publication date Sep 3, 2020
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Antonio SANCHEZ
- C07 - ORGANIC CHEMISTRY
Information Patent Application
N-H FREE AND SI-RICH PER-HYDRIDOPOLYSILZANE COMPOSITIONS, THEIR SYN...
- Publication number 20200277190
- Publication date Sep 3, 2020
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Antonio SANCHEZ
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Ge-CONTAINING Co-FILM FORMING MATERIAL, Ge-CONTAINING Co FILM AND F...
- Publication number 20200234960
- Publication date Jul 23, 2020
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Rocio ARTEAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID MATERIAL CONTAINER AND SOLID MATERIAL PRODUCT WITH SOLID MATE...
- Publication number 20200208263
- Publication date Jul 2, 2020
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Kohei TARUTANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Jean-Marc Girard

Person

Patents Grantslast 30 patents

Silicon-based self-assembling monolayer compositions and surface pr...

Group 6 transition metal-containing compositions for vapor depositi...

Reagents to remove oxygen from metal oxyhalide precursors in thin f...

Si-containing film forming precursors and methods of using the same

Preprocessing method for solid material, and solid material product...

Perhydropolysilazane compositions and methods for forming oxide fil...

Si-containing film forming precursors and methods of using the same

Tungsten pentachloride conditioning and crystalline phase manipulation

Cureable formulations for forming low-k dielectric silicon-containi...

Ultra-low temperature ALD to form high-quality Si-containing film

Si-containing film forming compositions and methods of making and u...

Area selective deposition of metal containing films

Catalytic reduction of halogenated carbosilanes and halogenated car...

Lanthanide precursors and deposition of lanthanide-containing films...

N—H free and Si-rich per-hydridopolysilzane compositions, their syn...

Ge-containing Co-film forming material, Ge-containing Co film and f...

Titanium-containing film forming compositions for vapor deposition...

Si-containing film forming precursors and methods of using the same

Tungsten pentachloride conditioning and crystalline phase manipulation

Group 6 transition metal-containing compositions for vapor depositi...

Methods for vapor deposition of group 4 transition metal-containing...

Tungsten pentachloride conditioning and crystalline phase manipulation

Zirconium, hafnium, titanium precursors and deposition of group 4 c...

Preparation of Si-H containing iodosilanes via halide exchange reac...

Tungsten pentachloride conditioning and crystalline phase manipulation

Titanium-containing film forming compositions for vapor deposition...

Heterogeneous wet synthesis process for preparation of high purity...

Etching reactants and plasma-free etching processes using the same

N—H free and SI-rich per-hydridopolysilzane compositions, their syn...

Titanium-containing film forming compositions for vapor deposition...

Patents Applicationslast 30 patents

METHOD OF FORMING A RUTHENIUM-CONTAINING LAYER AND LAMINATE

MOLYBDENUM PENTACHLORIDE CONDITIONING AND CRYSTALLINE PHASE MANIPUL...

METHOD OF FORMING A CONFORMAL AND CONTINUOUS CRYSTALLINE SILICON NA...

SILICON-BASED SELF-ASSEMBLING MONOLAYER COMPOSITIONS AND SURFACE PR...

SELECTIVE THERMAL ETCHING METHODS OF METAL OR METAL-CONTAINING MATE...

DEVICES HAVING A RARE EARTH (OXY) FLUORIDE COATING FOR IMPROVED RES...

CURABLE FORMULATIONS FOR FORMING LOW-k DIELECTRIC SILICON-CONTAININ...

SOLID MATERIAL CONTAINER AND SOLID MATERIAL PRODUCT WITH SOLID MATE...

SI-CONTAINING FILM FORMING PRECURSORS AND METHODS OF USING THE SAME

REAGENTS TO REMOVE OXYGEN FROM METAL OXYHALIDE PRECURSORS IN THIN F...

GROUP 6 TRANSITION METAL-CONTAINING COMPOSITIONS FOR VAPOR DEPOSITI...

METHODS FOR VAPOR DEPOSITION OF GROUP 4 TRANSITION METAL-CONTAINING...

Si-CONTAINING FILM FORMING PRECURSORS AND METHODS OF USING THE SAME

CUREABLE FORMULATIONS FOR FORMING LOW-k DIELECTRIC SILICON-CONTAINI...

Area selective deposition of metal containing films

TUNGSTEN PENTACHLORIDE CONDITIONING AND CRYSTALLINE PHASE MANIPULATION

PREPROCESSING METHOD FOR SOLID MATERIAL, AND SOLID MATERIAL PRODUCT...

PERHYDROPOLYSILAZANE COMPOSITIONS AND METHODS FOR FORMING NITRIDE F...

PERHYDROPOLYSILAZANE COMPOSITIONS AND METHODS FOR FORMING OXIDE FIL...

CATALYTIC REDUCTION OF HALOGENATED CARBOSILANES AND HALOGENATED CAR...

CYCLIC GERMANIUM SILYLAMIDO PRECURSORS FOR GE-CONTAINING FILM DEPOS...

PREPARATION OF SI-H CONTAINING IODOSILANES VIA HALIDE EXCHANGE REAC...

ULTRA-LOW TEMPERATURE ALD TO FORM HIGH-QUALITY SI-CONTAINING FILM

ALKYLAMINO-SUBSTITUTED CARBOSILANE PRECURSORS

HETEROGENEOUS WET SYNTHESIS PROCESS FOR PREPARATION OF HIGH PURITY...

TUNGSTEN PENTACHLORIDE CONDITIONING AND CRYSTALLINE PHASE MANIPULATION

TITANIUM-CONTAINING FILM FORMING COMPOSITIONS FOR VAPOR DEPOSITION...

N-H FREE AND SI-RICH PER-HYDRIDOPOLYSILZANE COMPOSITIONS, THEIR SYN...

Ge-CONTAINING Co-FILM FORMING MATERIAL, Ge-CONTAINING Co FILM AND F...

SOLID MATERIAL CONTAINER AND SOLID MATERIAL PRODUCT WITH SOLID MATE...