Jean-Marc Hueber

Person

La Jolla, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
ArF laser with low pulse energy and high rep rate
- Patent number 6,553,049
- Issue date Apr 22, 2003
- Cymer, Inc.
- Herve A. Besaucele
- G01 - MEASURING TESTING
Information Patent Grant
Reliable, modular, production quality narrow-band high rep rate F2...
- Patent number RE38054
- Issue date Apr 1, 2003
- Cymer, Inc.
- Thomas Hofmann
- 372 - Coherent light generators
Information Patent Grant
Gas discharge laser long life electrodes
- Patent number 6,466,602
- Issue date Oct 15, 2002
- Cymer, Inc.
- Vladimir B. Fleurov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme repetition rate gas discharge laser
- Patent number 6,442,181
- Issue date Aug 27, 2002
- Cymer, Inc.
- I. Roger Oliver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas discharge laser with blade-dielectric electrode
- Patent number 6,414,979
- Issue date Jul 2, 2002
- Cymer, Inc.
- Richard C. Ujazdowski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas discharge laser electrode with reduced sensitivity to adverse b...
- Patent number 6,363,094
- Issue date Mar 26, 2002
- Cymer, Inc.
- Richard G. Morton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electric discharge laser with acoustic chirp correction
- Patent number 6,317,447
- Issue date Nov 13, 2001
- Cymer, Inc.
- William N. Partlo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reliable, modular, production quality narrow-band high rep rate F.s...
- Patent number 6,018,537
- Issue date Jan 25, 2000
- Cymer, Inc.
- Thomas Hofmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Gas discharge laser with blade-dielectric electrode
- Publication number 20010050939
- Publication date Dec 13, 2001
- Richard C. Ujazdowski
- H01 - BASIC ELECTRIC ELEMENTS

Jean-Marc Hueber

Person

Patents Grantslast 30 patents

ArF laser with low pulse energy and high rep rate

Reliable, modular, production quality narrow-band high rep rate F2...

Gas discharge laser long life electrodes

Extreme repetition rate gas discharge laser

Gas discharge laser with blade-dielectric electrode

Gas discharge laser electrode with reduced sensitivity to adverse b...

Electric discharge laser with acoustic chirp correction

Reliable, modular, production quality narrow-band high rep rate F.s...

Patents Applicationslast 30 patents

Gas discharge laser with blade-dielectric electrode