Jean-Noel Fehr

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Pully, CH

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Patents Grantslast 30 patents

Information Patent Grant
Projection exposure apparatus and projection optical system
- Patent number 7,477,355
- Issue date Jan 13, 2009
- Carl Zeiss SMT AG
- Jean-Noel Fehr
- G02 - OPTICS
Information Patent Grant
Optical component that includes a material having a thermal longitu...
- Patent number 7,428,037
- Issue date Sep 23, 2008
- Carl Zeiss SMT AG
- Timo Laufer
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Projection exposure apparatus and projection optical system
- Publication number 20060119822
- Publication date Jun 8, 2006
- Carl Zeiss SMT AG
- Jean-Noel Fehr
- G02 - OPTICS
Information Patent Application
Method for the targeted deformation of an optical element
- Publication number 20050280910
- Publication date Dec 22, 2005
- Jean Noel Fehr
- G02 - OPTICS
Information Patent Application
Optical component that includes a material having a thermal longitu...
- Publication number 20050207001
- Publication date Sep 22, 2005
- Timo Laufer
- G02 - OPTICS