Jean-Paul Booth

Person

Boullay les Troux, FR

People

Patents Grantslast 30 patents

Information Patent Grant
Circuit for impedance matching between a generator and a load at mu...
- Patent number 10,796,885
- Issue date Oct 6, 2020
- Centre National de la Recherche Scientifique
- Erik Johnson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for controlling ion flux in an RF plasma
- Patent number 10,319,565
- Issue date Jun 11, 2019
- Le Centre National de la Recherche Scientifique
- Bastien Bruneau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Passive capacitively-coupled electrostatic (CCE) probe method for d...
- Patent number 9,153,421
- Issue date Oct 6, 2015
- Lam Research Corporation
- Jean-Paul Booth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system for detecting in-situ arcing events during substr...
- Patent number 9,129,779
- Issue date Sep 8, 2015
- Lam Research Corporation
- Jean-Paul Booth
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Plasma processing in a capacitively-coupled reactor with trapezoida...
- Patent number 8,968,838
- Issue date Mar 3, 2015
- Ecole Polytechnique
- Jean-Paul Booth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma unconfinement sensor and methods thereof
- Patent number 8,894,804
- Issue date Nov 25, 2014
- Lam Research Corporation
- Jean-Paul Booth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for automatically characterizing a plasma
- Patent number 8,849,585
- Issue date Sep 30, 2014
- Lam Research Corporation
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitively-coupled electrostatic (CCE) probe arrangement for dete...
- Patent number 8,780,522
- Issue date Jul 15, 2014
- Lam Research Corporation
- Jean-Paul Booth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma-facing probe arrangement including vacuum gap for use in a p...
- Patent number 8,547,085
- Issue date Oct 1, 2013
- Lam Research Corporation
- Jean-Paul Booth
- G01 - MEASURING TESTING
Information Patent Grant
Passive capacitively-coupled electrostatic (CCE) probe arrangement...
- Patent number 8,179,152
- Issue date May 15, 2012
- Lam Research Corporation
- Jean-Paul Booth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitively-coupled electrostatic (CCE) probe arrangement for dete...
- Patent number 8,164,349
- Issue date Apr 24, 2012
- Lam Research Corporation
- Jean-Paul Booth
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
RF-biased capacitively-coupled electrostatic (RFB-CCE) probe arrang...
- Patent number 8,164,353
- Issue date Apr 24, 2012
- Lam Research Corporation
- Jean-Paul Booth
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Passive capacitively-coupled electrostatic (CCE) probe arrangement...
- Patent number 8,159,233
- Issue date Apr 17, 2012
- Lam Research Corporation
- Jean-Paul Booth
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method and device for measuring an ion flow in a plasma
- Patent number 5,936,413
- Issue date Aug 10, 1999
- Centre National de la Recherche Scientifique
- Jean-Paul Booth
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR CONTROLLING ION FLUX IN AN RF PLASMA
- Publication number 20170084428
- Publication date Mar 23, 2017
- ECOLE POLYTECHNIQUE
- Bastien Bruneau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRICAL CIRCUIT TO IMPEDANCE MATCH A SOURCE AND A LOAD AT MULTIP...
- Publication number 20150179406
- Publication date Jun 25, 2015
- ECOLE POLYTECHNIQUE
- Erik Johnson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PLASMA PROCESSING IN A CAPACITIVELY-COUPLED REACTOR WITH TRAPEZOIDA...
- Publication number 20130136872
- Publication date May 30, 2013
- Centre National de la Recherche Scientifique
- Jean-Paul Booth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PASSIVE CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE METHOD FOR D...
- Publication number 20120316834
- Publication date Dec 13, 2012
- Jean-Paul Booth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM FOR DETECTING IN-SITU ARCING EVENTS DURING SUBSTR...
- Publication number 20120259562
- Publication date Oct 11, 2012
- Jean-Paul Booth
- G01 - MEASURING TESTING
Information Patent Application
PLASMA UNCONFINEMENT SENSOR AND METHODS THEREOF
- Publication number 20110128017
- Publication date Jun 2, 2011
- Jean-Paul Booth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PASSIVE CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT...
- Publication number 20100033195
- Publication date Feb 11, 2010
- Jean-Paul Booth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT FOR DETE...
- Publication number 20100008015
- Publication date Jan 14, 2010
- Jean-Paul Booth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF-BIASED CAPACITIVELY-COUPLED ELECTROSTATIC (RFB-CCE) PROBE ARRANG...
- Publication number 20100007362
- Publication date Jan 14, 2010
- Jean-Paul Booth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PASSIVE CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT...
- Publication number 20100007359
- Publication date Jan 14, 2010
- Jean-Paul Booth
- G01 - MEASURING TESTING
Information Patent Application
PLASMA-FACING PROBE ARRANGEMENT INCLUDING VACUUM GAP FOR USE IN A P...
- Publication number 20100007337
- Publication date Jan 14, 2010
- Jean-Paul Booth
- G01 - MEASURING TESTING
Information Patent Application
CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT FOR DETE...
- Publication number 20100006417
- Publication date Jan 14, 2010
- Jean-Paul Booth
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS FOR AUTOMATICALLY CHARACTERIZING A PLASMA
- Publication number 20090322342
- Publication date Dec 31, 2009
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS

Jean-Paul Booth

Person

Patents Grantslast 30 patents

Circuit for impedance matching between a generator and a load at mu...

Method and system for controlling ion flux in an RF plasma

Passive capacitively-coupled electrostatic (CCE) probe method for d...

Processing system for detecting in-situ arcing events during substr...

Plasma processing in a capacitively-coupled reactor with trapezoida...

Plasma unconfinement sensor and methods thereof

Methods for automatically characterizing a plasma

Capacitively-coupled electrostatic (CCE) probe arrangement for dete...

Plasma-facing probe arrangement including vacuum gap for use in a p...

Passive capacitively-coupled electrostatic (CCE) probe arrangement...

Capacitively-coupled electrostatic (CCE) probe arrangement for dete...

RF-biased capacitively-coupled electrostatic (RFB-CCE) probe arrang...

Passive capacitively-coupled electrostatic (CCE) probe arrangement...

Method and device for measuring an ion flow in a plasma

Patents Applicationslast 30 patents

METHOD AND SYSTEM FOR CONTROLLING ION FLUX IN AN RF PLASMA

ELECTRICAL CIRCUIT TO IMPEDANCE MATCH A SOURCE AND A LOAD AT MULTIP...

PLASMA PROCESSING IN A CAPACITIVELY-COUPLED REACTOR WITH TRAPEZOIDA...

PASSIVE CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE METHOD FOR D...

PROCESSING SYSTEM FOR DETECTING IN-SITU ARCING EVENTS DURING SUBSTR...

PLASMA UNCONFINEMENT SENSOR AND METHODS THEREOF

PASSIVE CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT...

CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT FOR DETE...

RF-BIASED CAPACITIVELY-COUPLED ELECTROSTATIC (RFB-CCE) PROBE ARRANG...

PASSIVE CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT...

PLASMA-FACING PROBE ARRANGEMENT INCLUDING VACUUM GAP FOR USE IN A P...

CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT FOR DETE...

METHODS FOR AUTOMATICALLY CHARACTERIZING A PLASMA