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Jean-Philippe Gouy
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Quaix En Chartreuse, FR
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last 30 patents
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Patent Grant
Method of forming supports bearing features, such as lithography masks
Patent number
8,048,354
Issue date
Nov 1, 2011
Commissariat a l'Energie Atomique
Stephan Landis
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
Method of Forming Supports Bearing Features, Such as Lithography Masks
Publication number
20080268351
Publication date
Oct 30, 2008
Stephan Landis
B81 - MICRO-STRUCTURAL TECHNOLOGY