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Jean-Philippe Xavier Van Damme
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Wezembeek-Oppem, BE
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Patents Grants
last 30 patents
Information
Patent Grant
Patterning device cooling system and method of thermally conditioni...
Patent number
11,036,148
Issue date
Jun 15, 2021
ASML Netherlands B.V.
Hakki Ergün Cekli
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Setpoint generator, lithographic apparatus, lithographic apparatus...
Patent number
10,908,517
Issue date
Feb 2, 2021
ASML Netherlands B.V.
Jean-Philippe Xavier Van Damme
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Patterning device cooling apparatus
Patent number
10,642,166
Issue date
May 5, 2020
ASML Holding N.V.
Güneş Nakiboglu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Patterning device cooling system and method of thermally conditioni...
Patent number
10,495,986
Issue date
Dec 3, 2019
ASML Netherlands B.V.
Hakki Ergün Cekli
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and lithographic projection method
Patent number
10,459,354
Issue date
Oct 29, 2019
ASML Netherlands B.V.
Kevin Van De Ruit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Patterning device cooling apparatus
Patent number
10,394,139
Issue date
Aug 27, 2019
ASML Holding N.V.
Güneş Nakiboglu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Patterning device support and lithographic apparatus
Patent number
9,740,112
Issue date
Aug 22, 2017
ASML Holding N.V.
Arindam Sinharoy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of operating a lithographic apparatus, device manufacturing...
Patent number
9,507,279
Issue date
Nov 29, 2016
ASML Netherlands B.V.
Emil Peter Schmitt-Weaver
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,988,657
Issue date
Mar 24, 2015
ASML Netherlands B.V.
Frank Johannes Jacobus Van Boxtel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SYSTEMS, METHODS, AND DEVICES FOR THERMAL CONDITIONING OF RETICLES...
Publication number
20240295832
Publication date
Sep 5, 2024
ASML NETHERLANDS B.V.
Jean-Philippe Xavier VAN DAMME
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND ARRANGEMENT FOR DETERMINING THERMALLY-INDUCED DEFORMATIONS
Publication number
20240280907
Publication date
Aug 22, 2024
ASML Netherlands B.V.
Hasret ERCISLI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERNING DEVICE COOLING SYSTEM AND METHOD OF THERMALLY CONDITIONI...
Publication number
20200103767
Publication date
Apr 2, 2020
ASML NETHERLANDS B.V.
Hakki Ergün CEKLI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERNING DEVICE COOLING APPARATUS
Publication number
20190346777
Publication date
Nov 14, 2019
ASML NETHERLANDS B.V.
Günes NAKIBOGLU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERNING DEVICE COOLING APPARATUS
Publication number
20190121248
Publication date
Apr 25, 2019
ASML NETHERLANDS B.V.
Günes NAKIBOGLU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC PROJECTION METHOD
Publication number
20180095369
Publication date
Apr 5, 2018
ASML NETHERLANDS B.V.
Kevin VAN DE RUIT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Patterning Device Support and Lithographic Apparatus
Publication number
20150277240
Publication date
Oct 1, 2015
ASML Holding N.V.
Arindam Sinharoy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of Operating a Lithographic Apparatus, Device Manufacturing...
Publication number
20140168627
Publication date
Jun 19, 2014
ASML NETHERLANDS B.V.
Emil Peter SCHMITT-WEAVER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20130010270
Publication date
Jan 10, 2013
ASML NETHERLANDS B.V.
Frank Johannes Jacobus VAN BOXTEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY