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Jean-Yves Robic
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Grenoble, FR
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Patents Grants
last 30 patents
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Patent Grant
Structure of a lithography mask
Patent number
7,745,070
Issue date
Jun 29, 2010
Commissariat a l'Energie Atomique
Christelle Charpin-Nicolle
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Structure for a reflection lithography mask and method for making same
Patent number
6,593,036
Issue date
Jul 15, 2003
Commissariat a l'Energie Atomique
Jean-Yves Robic
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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Patent Grant
Multilayer stack of fluoride materials usable in optics and its pro...
Patent number
5,879,820
Issue date
Mar 9, 1999
Commissariat a l'Energie Atomique
Etienne Quesnel
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
Structure Of A Lithography Mask
Publication number
20070292772
Publication date
Dec 20, 2007
COMMISSARIAT A L'ENERGIE ATOMIQUE
Christelle Charpin-Nicolle
B82 - NANO-TECHNOLOGY