Jeff A. Bogart

Person

Los Gatos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Replaceable upper chamber parts of plasma processing apparatus
- Patent number 10,074,521
- Issue date Sep 11, 2018
- Lam Research Corporation
- Daniel Arthur Brown
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of a silicon structure and deep silicon etch with profi...
- Patent number 9,865,472
- Issue date Jan 9, 2018
- Lam Research Corporation
- Robert Chebi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication of a silicon structure and deep silicon etch with profi...
- Patent number 9,330,926
- Issue date May 3, 2016
- Lam Research Corporation
- Robert Chebi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Replaceable upper chamber parts of plasma processing apparatus
- Patent number 9,076,634
- Issue date Jul 7, 2015
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for accessing a process chamber using a dual zone gas injec...
- Patent number 8,524,099
- Issue date Sep 3, 2013
- Lam Research Corporation
- Jeff A. Bogart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of and apparatus for accessing a process chamber using a du...
- Patent number 7,928,366
- Issue date Apr 19, 2011
- Lam Research Corporation
- Jeff A. Bogart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode and pad assembly for processing conductive layers
- Patent number 7,550,070
- Issue date Jun 23, 2009
- Novellus Systems, Inc.
- Bulent M. Basol
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Low-force electrochemical mechanical processing method and apparatus
- Patent number 7,238,092
- Issue date Jul 3, 2007
- Novellus Systems, Inc.
- Bulent M. Basol
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and system to provide electrical contacts for electrotreatin...
- Patent number 7,211,174
- Issue date May 1, 2007
- Novellus Systems, Inc.
- Bulent M Basol
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask plate design
- Patent number 7,201,829
- Issue date Apr 10, 2007
- Novellus Systems, Inc.
- Bulent M. Basol
- B24 - GRINDING POLISHING
Information Patent Grant
Means to improve center to edge uniformity of electrochemical mecha...
- Patent number 7,141,146
- Issue date Nov 28, 2006
- ASM Nutool, Inc.
- Jeffrey Bogart
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for monitoring and controlling force applied on workpiece su...
- Patent number 6,967,166
- Issue date Nov 22, 2005
- ASM NuTool, Inc.
- Bulent M. Basol
- B24 - GRINDING POLISHING
Information Patent Grant
Techniques for improving etch rate uniformity
- Patent number 6,344,105
- Issue date Feb 5, 2002
- Lam Research Corporation
- John E. Daugherty
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FABRICATION OF A SILICON STRUCTURE AND DEEP SILICON ETCH WITH PROFI...
- Publication number 20160233102
- Publication date Aug 11, 2016
- LAM RESEARCH CORPORATION
- Robert CHEBI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REPLACEABLE UPPER CHAMBER PARTS OF PLASMA PROCESSING APPARATUS
- Publication number 20150279621
- Publication date Oct 1, 2015
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for Accessing a Process Chamber Using a Dual Zone Gas Injec...
- Publication number 20110103805
- Publication date May 5, 2011
- Jeff A. Bogart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REPLACEABLE UPPER CHAMBER PARTS OF PLASMA PROCESSING APPARATUS
- Publication number 20110056626
- Publication date Mar 10, 2011
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FABRICATION OF A SILICON STRUCTURE AND DEEP SILICON ETCH WITH PROFI...
- Publication number 20090184089
- Publication date Jul 23, 2009
- LAM RESEARCH CORPORATION
- Robert CHEBI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of and apparatus for accessing a process chamber using a du...
- Publication number 20080083883
- Publication date Apr 10, 2008
- LAM RESEARCH CORPORATION
- Jeff A. Bogart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrode and pad assembly for processing conductive layers
- Publication number 20070181443
- Publication date Aug 9, 2007
- Bulent M. Basol
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MEANS TO IMPROVE CENTER TO EDGE UNIFORMITY OF ELECTROCHEMICAL MECHA...
- Publication number 20070131563
- Publication date Jun 14, 2007
- ASM NUTOOL, INC.
- Jeffrey Bogart
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Means to eliminate bubble entrapment during electrochemical process...
- Publication number 20060131177
- Publication date Jun 22, 2006
- Jeffrey Bogart
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Apparatus for monitoring and controlling force applied on workpiece...
- Publication number 20060096702
- Publication date May 11, 2006
- Bulent M. Basol
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Means to improve center-to edge uniformity of electrochemical mecha...
- Publication number 20040266193
- Publication date Dec 30, 2004
- Jeffrey Bogart
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Process and apparatus for air bubble removal during electrochemical...
- Publication number 20040182715
- Publication date Sep 23, 2004
- Jeffrey Bogart
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for monitoring and controlling force applied o...
- Publication number 20030194866
- Publication date Oct 16, 2003
- Bulent M. Basol
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and system to provide electrical contacts for electrotreatin...
- Publication number 20030089598
- Publication date May 15, 2003
- Bulent M. Basol
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Low-force electrochemical mechanical processing method and apparatus
- Publication number 20030064669
- Publication date Apr 3, 2003
- Bulent M. Basol
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Mask plate design
- Publication number 20020121445
- Publication date Sep 5, 2002
- Bulent M. Basol
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Jeff A. Bogart

Person

Patents Grantslast 30 patents

Replaceable upper chamber parts of plasma processing apparatus

Fabrication of a silicon structure and deep silicon etch with profi...

Fabrication of a silicon structure and deep silicon etch with profi...

Replaceable upper chamber parts of plasma processing apparatus

Methods for accessing a process chamber using a dual zone gas injec...

Methods of and apparatus for accessing a process chamber using a du...

Electrode and pad assembly for processing conductive layers

Low-force electrochemical mechanical processing method and apparatus

Method and system to provide electrical contacts for electrotreatin...

Mask plate design

Means to improve center to edge uniformity of electrochemical mecha...

Method for monitoring and controlling force applied on workpiece su...

Techniques for improving etch rate uniformity

Patents Applicationslast 30 patents

FABRICATION OF A SILICON STRUCTURE AND DEEP SILICON ETCH WITH PROFI...

REPLACEABLE UPPER CHAMBER PARTS OF PLASMA PROCESSING APPARATUS

Methods for Accessing a Process Chamber Using a Dual Zone Gas Injec...

REPLACEABLE UPPER CHAMBER PARTS OF PLASMA PROCESSING APPARATUS

FABRICATION OF A SILICON STRUCTURE AND DEEP SILICON ETCH WITH PROFI...

Methods of and apparatus for accessing a process chamber using a du...

Electrode and pad assembly for processing conductive layers

MEANS TO IMPROVE CENTER TO EDGE UNIFORMITY OF ELECTROCHEMICAL MECHA...

Means to eliminate bubble entrapment during electrochemical process...

Apparatus for monitoring and controlling force applied on workpiece...

Means to improve center-to edge uniformity of electrochemical mecha...

Process and apparatus for air bubble removal during electrochemical...

Method and apparatus for monitoring and controlling force applied o...

Method and system to provide electrical contacts for electrotreatin...

Low-force electrochemical mechanical processing method and apparatus

Mask plate design