Membership
Tour
Register
Log in
Jeff Browning
Follow
Person
Maricopa, AZ, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Applications
last 30 patents
Information
Patent Application
Vertically translatable chuck assembly and method for a plasma reac...
Publication number
20040050327
Publication date
Mar 18, 2004
TOKYO ELECTRON LIMITED
Wayne L. Johnson
H01 - BASIC ELECTRIC ELEMENTS