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Jeff C. Olsen
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Los Gatos, CA, US
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last 30 patents
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Patent Grant
Multiple frequency plasma chamber with grounding capacitor at cathode
Patent number
6,857,387
Issue date
Feb 22, 2005
Applied Materials, Inc.
Sheng Sun
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing amorphous silicon based films having controlle...
Patent number
6,352,910
Issue date
Mar 5, 2002
Applied Komatsu Technology, Inc.
William R. Harshbarger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming silicon oxy-nitride films by plasma-enhanced chem...
Patent number
6,207,304
Issue date
Mar 27, 2001
Applied Materials, Inc.
Kam Law
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dual frequency excitation of plasma for film deposition
Patent number
6,024,044
Issue date
Feb 15, 2000
Applied Komatsu Technology, Inc.
Kam S. Law
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming silicon oxy-nitride films by plasma-enhanced chem...
Patent number
5,928,732
Issue date
Jul 27, 1999
Applied Materials, Inc.
Kam Law
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Method of depositing amorphous silicon based films having controlle...
Publication number
20020115269
Publication date
Aug 22, 2002
APPLIED MATERIALS, INC.
William R. Harshbarger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...