Jeff Rudd

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Slurry flow rate monitoring in chemical-mechanical polisher using p...
- Patent number 6,855,031
- Issue date Feb 15, 2005
- Applied Materials, Inc.
- Boris Fuksshimov
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Slurry flow rate monitoring in chemical-mechanical polisher using p...
- Publication number 20030166378
- Publication date Sep 4, 2003
- Boris Fuksshimov
- B24 - GRINDING POLISHING