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Jefferson Lu
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Hsinchu, TW
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Patents Grants
last 30 patents
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Patent Grant
Method of planarizing spin-on material layer and manufacturing phot...
Patent number
6,998,277
Issue date
Feb 14, 2006
ProMos Technologies, Inc.
Jefferson Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for etching a trench through an anti-reflective coating
Patent number
6,743,726
Issue date
Jun 1, 2004
ProMos Technologies, Inc.
Jefferson Lu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD OF PLANARIZING SPIN-ON MATERIAL LAYER AND MANUFACTURING PHOT...
Publication number
20050196879
Publication date
Sep 8, 2005
Jefferson Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for etching a trench through an anti-reflective coating
Publication number
20040009672
Publication date
Jan 15, 2004
ProMOS Technologies, Inc.
Jefferson Lu
H01 - BASIC ELECTRIC ELEMENTS