Jeffrey A. Burgess

Person

Manchester, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Low profile extraction electrode assembly
- Patent number 10,153,127
- Issue date Dec 11, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Jeffrey A. Burgess
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Source housing assembly for controlling ion beam extraction stabili...
- Patent number 9,934,928
- Issue date Apr 3, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low profile extraction electrode assembly
- Patent number 9,818,575
- Issue date Nov 14, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Jeffrey A. Burgess
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for containing catastrophic failure of a turbomolecular pump
- Patent number 7,767,023
- Issue date Aug 3, 2010
- Tokyo Electron Limited
- Jeffrey Burgess
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Sealing between vacuum chambers
- Patent number 7,559,557
- Issue date Jul 14, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Gregory D. Thronson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas flow restricting cathode system for ion implanter and related m...
- Patent number 6,984,831
- Issue date Jan 10, 2006
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for removing particles entrained in an ion beam
- Patent number 6,525,326
- Issue date Feb 25, 2003
- Axcelis Technologies, Inc.
- Eric R. Harrington
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LOW PROFILE EXTRACTION ELECTRODE ASSEMBLY
- Publication number 20180342367
- Publication date Nov 29, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Jeffrey A. BURGESS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW PROFILE EXTRACTION ELECTRODE ASSEMBLY
- Publication number 20170140895
- Publication date May 18, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Jeffrey A. BURGESS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOURCE HOUSING ASSEMBLY FOR CONTROLLING ION BEAM EXTRACTION STABILI...
- Publication number 20160336138
- Publication date Nov 17, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sealing between vacuum chambers
- Publication number 20090050825
- Publication date Feb 26, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Gregory D. Thronson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR CONTAINING CATASTROPHIC FAILURE OF A TURBOMOLECULAR PUMP
- Publication number 20080240948
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Jeffrey Burgess
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
Gas flow restricting cathode system for ion implanter and related m...
- Publication number 20050194550
- Publication date Sep 8, 2005
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS

Jeffrey A. Burgess

Person

Patents Grantslast 30 patents

Low profile extraction electrode assembly

Source housing assembly for controlling ion beam extraction stabili...

Low profile extraction electrode assembly

Device for containing catastrophic failure of a turbomolecular pump

Sealing between vacuum chambers

Gas flow restricting cathode system for ion implanter and related m...

System and method for removing particles entrained in an ion beam

Patents Applicationslast 30 patents

LOW PROFILE EXTRACTION ELECTRODE ASSEMBLY

LOW PROFILE EXTRACTION ELECTRODE ASSEMBLY

SOURCE HOUSING ASSEMBLY FOR CONTROLLING ION BEAM EXTRACTION STABILI...

Sealing between vacuum chambers

DEVICE FOR CONTAINING CATASTROPHIC FAILURE OF A TURBOMOLECULAR PUMP

Gas flow restricting cathode system for ion implanter and related m...