Jeffrey A. Chard

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Data flow management in generating profile models used in optical m...
- Patent number 7,783,669
- Issue date Aug 24, 2010
- Tokyo Electron Limited
- Hong Qiu
- G01 - MEASURING TESTING
Information Patent Grant
Data flow management in generating different signal formats used in...
- Patent number 7,765,234
- Issue date Jul 27, 2010
- Tokyo Electron Limited
- Hong Qiu
- G01 - MEASURING TESTING
Information Patent Grant
Automated process control using optical metrology and a correlation...
- Patent number 7,667,858
- Issue date Feb 23, 2010
- Tokyo Electron Limited
- Jeffrey Alexander Chard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Determining one or more profile parameters of a structure using opt...
- Patent number 7,596,422
- Issue date Sep 29, 2009
- Tokyo Electron Limited
- Jeffrey Alexander Chard
- G01 - MEASURING TESTING
Information Patent Grant
Evaluating a profile model to characterize a structure to be examin...
- Patent number 7,518,740
- Issue date Apr 14, 2009
- Tokyo Electron Limited
- Jeffrey A. Chard
- G01 - MEASURING TESTING
Information Patent Grant
Parallel profile determination in optical metrology
- Patent number 7,515,283
- Issue date Apr 7, 2009
- Tokyo Electron, Ltd.
- Tri Thanh Khuong
- G01 - MEASURING TESTING
Information Patent Grant
Parallel profile determination for an optical metrology system
- Patent number 7,469,192
- Issue date Dec 23, 2008
- Tokyo Electron Ltd.
- Tri Thanh Khuong
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Determining one or more profile parameters of a structure using opt...
- Publication number 20080170242
- Publication date Jul 17, 2008
- TOKYO ELECTRON LIMITED
- Jeffrey Chard
- G01 - MEASURING TESTING
Information Patent Application
Automated process control using optical metrology and a correlation...
- Publication number 20080170241
- Publication date Jul 17, 2008
- TOKYO ELECTRON LIMITED
- Jeffrey Chard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Data flow management in generating profile models used in optical m...
- Publication number 20080091724
- Publication date Apr 17, 2008
- TOKYO ELECTRON LIMITED
- Hong Qiu
- G01 - MEASURING TESTING
Information Patent Application
Data flow management in generating different signal formats used in...
- Publication number 20080089574
- Publication date Apr 17, 2008
- TOKYO ELECTRON LIMITED
- Hong Qiu
- G01 - MEASURING TESTING
Information Patent Application
Generating a profile model to characterize a structure to be examin...
- Publication number 20080013107
- Publication date Jan 17, 2008
- TOKYO ELECTRON LIMITED
- Jeffrey A. Chard
- G01 - MEASURING TESTING
Information Patent Application
Parallel profile determination for an optical metrology system
- Publication number 20080015812
- Publication date Jan 17, 2008
- TOKYO ELECTRON LIMITED
- Tri Thanh Khuong
- G01 - MEASURING TESTING
Information Patent Application
Parallel profile determination in optical metrology
- Publication number 20080013108
- Publication date Jan 17, 2008
- TOKYO ELECTRON LIMITED
- Tri Thanh Khuong
- G01 - MEASURING TESTING
Information Patent Application
Evaluating a profile model to characterize a structure to be examin...
- Publication number 20080007738
- Publication date Jan 10, 2008
- TOKYO ELECTRON LIMITED
- Jeffrey A. Chard
- G01 - MEASURING TESTING

Jeffrey A. Chard

Person

Patents Grantslast 30 patents

Data flow management in generating profile models used in optical m...

Data flow management in generating different signal formats used in...

Automated process control using optical metrology and a correlation...

Determining one or more profile parameters of a structure using opt...

Evaluating a profile model to characterize a structure to be examin...

Parallel profile determination in optical metrology

Parallel profile determination for an optical metrology system

Patents Applicationslast 30 patents

Determining one or more profile parameters of a structure using opt...

Automated process control using optical metrology and a correlation...

Data flow management in generating profile models used in optical m...

Data flow management in generating different signal formats used in...

Generating a profile model to characterize a structure to be examin...

Parallel profile determination for an optical metrology system

Parallel profile determination in optical metrology

Evaluating a profile model to characterize a structure to be examin...