Jeffrey Byers

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Immersion lithography using hafnium-based nanoparticles
- Patent number 8,134,684
- Issue date Mar 13, 2012
- Sematech, Inc.
- Paul A. Zimmerman
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
IMMERSION LITHOGRAPHY USING HAFNIUM-BASED NANOPARTICLES
- Publication number 20090213346
- Publication date Aug 27, 2009
- Paul A. Zimmerman
- B82 - NANO-TECHNOLOGY