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Jeffrey E. Lorelli
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Configurable liquid precursor vaporizer
Patent number
10,107,490
Issue date
Oct 23, 2018
Lam Research Corporation
Colin F. Smith
F22 - STEAM GENERATION
Information
Patent Grant
Dual-plenum showerhead with interleaved plenum sub-volumes
Patent number
9,728,380
Issue date
Aug 8, 2017
Novellus Systems, Inc.
Jonathan D. Mohn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Variable showerhead flow by varying internal baffle conductance
Patent number
9,121,097
Issue date
Sep 1, 2015
Novellus Systems, Inc.
Jonathan D. Mohn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for point-of-use treatment of effluent gas streams
Patent number
6,759,018
Issue date
Jul 6, 2004
Advanced Technology Materials, Inc.
Jose I. Arno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
VARIABLE SHOWERHEAD FLOW BY VARYING INTERNAL BAFFLE CONDUCTANCE
Publication number
20160020074
Publication date
Jan 21, 2016
Novellus Systems, Inc.
Jonathan D. Mohn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONFIGURABLE LIQUID PRECURSOR VAPORIZER
Publication number
20150377481
Publication date
Dec 31, 2015
LAM RESEARCH CORPORATION
Colin F. Smith
F22 - STEAM GENERATION
Information
Patent Application
VARIABLE SHOWERHEAD FLOW BY VARYING INTERNAL BAFFLE CONDUCTANCE
Publication number
20140061324
Publication date
Mar 6, 2014
Jonathan D. Mohn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS FOR MIXING FLUIDS
Publication number
20090034361
Publication date
Feb 5, 2009
Duy K. TRANG
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Apparatus and method for point-of-use treatment of effluent gas str...
Publication number
20040213721
Publication date
Oct 28, 2004
Jose I. Arno
C30 - CRYSTAL GROWTH