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Jeffrey E. McAninch
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Livermore, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Measurement system with separate optimized beam paths
Patent number
7,227,637
Issue date
Jun 5, 2007
Therma-Wave, Inc.
David Y. Wang
G01 - MEASURING TESTING
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Patent Grant
Measurement system with separate optimized beam paths
Patent number
7,061,614
Issue date
Jun 13, 2006
Therma-Wave, Inc.
David Y. Wang
G01 - MEASURING TESTING
Information
Patent Grant
Purge system for optical metrology tool
Patent number
6,813,026
Issue date
Nov 2, 2004
Therma-Wave, Inc.
Jeffrey E. McAninch
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Measurement system with separate optimized beam paths
Publication number
20060180761
Publication date
Aug 17, 2006
David Y. Wang
G01 - MEASURING TESTING
Information
Patent Application
Measurement system with separate optimized beam paths
Publication number
20030071996
Publication date
Apr 17, 2003
David Y. Wang
G01 - MEASURING TESTING
Information
Patent Application
Purge system for optical metrology tool
Publication number
20020149774
Publication date
Oct 17, 2002
Jeffrey E. McAninch
G01 - MEASURING TESTING