Jeffrey F. Summers

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Santa Barbara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Etching/bonding chamber for encapsulated devices and method of use
- Patent number 7,713,786
- Issue date May 11, 2010
- Innovative Micro Technology
- John S. Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual substrate electrostatic MEMS switch with hermetic seal and met...
- Patent number 7,528,691
- Issue date May 5, 2009
- Innovative Micro Technology
- Andrew D. Wallis
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Etching/bonding chamber for encapsulated devices and method of use
- Publication number 20090023244
- Publication date Jan 22, 2009
- Innovative Micro Technology
- John S. Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY