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Jeffrey John KOWALSKI
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Bethel, CT, US
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Patents Grants
last 30 patents
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Patent Grant
High stability collimator assembly, lithographic apparatus, and method
Patent number
11,204,559
Issue date
Dec 21, 2021
ASML Holdings N.V.
David Taub
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
High Stability Collimator Assembly, Lithographic Apparatus, and Method
Publication number
20210072654
Publication date
Mar 11, 2021
ASML Holding N.V.
David TAUB
G02 - OPTICS