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Jeffrey K. Varner
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Pacifica, CA, US
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last 30 patents
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Patent Grant
Method and apparatus for run-time correction of proximity effects i...
Patent number
5,847,959
Issue date
Dec 8, 1998
Etec Systems, Inc.
Lee H. Veneklasen
B82 - NANO-TECHNOLOGY
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last 30 patents
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Patent Application
Raster shaped beam, electron beam exposure strategy using a two dim...
Publication number
20020104970
Publication date
Aug 8, 2002
Stacey J. Winter
B82 - NANO-TECHNOLOGY