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Jeffrey Lan
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Cupertino, CA, US
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last 30 patents
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Patent Grant
Method of creating MEMS device cavities by a non-etching process
Patent number
8,394,656
Issue date
Mar 12, 2013
QUALCOMM MEMS Technologies, Inc.
Chun-Ming Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Method of creating MEMS device cavities by a non-etching process
Patent number
7,795,061
Issue date
Sep 14, 2010
QUALCOMM MEMS Technologies, Inc.
Chun-Ming Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
METHOD OF CREATING MEMS DEVICE CAVITIES BY A NON-ETCHING PROCESS
Publication number
20100271688
Publication date
Oct 28, 2010
QUALCOMM MEMS TECHNOLOGIES, INC.
Chun-Ming Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of creating MEMS device cavities by a non-etching process
Publication number
20070155051
Publication date
Jul 5, 2007
Chun-Ming Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY