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Jeffrey Lin
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Hsinchu, TW
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last 30 patents
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Patent Grant
Dynamic alignment of wafers using compensation values obtained thro...
Patent number
8,185,242
Issue date
May 22, 2012
Lam Research Corporation
Scott Wong
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
DYNAMIC ALIGNMENT OF WAFERS USING COMPENSATION VALUES OBTAINED THRO...
Publication number
20090279989
Publication date
Nov 12, 2009
LAM RESEARCH CORPORATION
Scott Wong
H01 - BASIC ELECTRIC ELEMENTS