Jeffrey M. Lauerhaas

Person

Waconia, MN, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for monitoring treatment of microelectronic subst...
- Patent number 10,748,788
- Issue date Aug 18, 2020
- Tel FSI, Inc.
- Brent D. Schwab
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tools and methods for processing microelectronic workpieces using p...
- Patent number 9,039,840
- Issue date May 26, 2015
- Tel FSI, Inc.
- Jeffrey M. Lauerhaas
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Process for removing carbon material from substrates
- Patent number 8,871,108
- Issue date Oct 28, 2014
- Tel FSI, Inc.
- Jeffrey M. Lauerhaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tools and methods for processing microelectronic workpieces using p...
- Patent number 8,684,015
- Issue date Apr 1, 2014
- Tel FSI, Inc.
- Jeffrey M. Lauerhaas
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Tools and methods for processing microelectronic workpieces using p...
- Patent number 8,235,062
- Issue date Aug 7, 2012
- FSI International, Inc.
- Jeffrey M. Lauerhaas
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR MONITORING TREATMENT OF MICROELECTRONIC SUBST...
- Publication number 20180269080
- Publication date Sep 20, 2018
- TEL FSI, Inc.
- Brent D. Schwab
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECIPE SELECTABLE DISPENSE SYSTEM AND METHOD OF OPERATING
- Publication number 20180190517
- Publication date Jul 5, 2018
- TEL FSI, Inc.
- David DeKraker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR WET STRIPPING SILICON-CONTAINING ORGANIC LAYERS
- Publication number 20160284535
- Publication date Sep 29, 2016
- TEL FSI, Inc.
- Jeffrey M. Lauerhaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS COMPRISING WATER VAPOR FOR HAZE ELIMINATION AND RESIDUE REM...
- Publication number 20140332034
- Publication date Nov 13, 2014
- TEL FSI, Inc.
- Jeffrey M. Lauerhaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FOR REMOVING CARBON MATERIAL FROM SUBSTRATES
- Publication number 20140206195
- Publication date Jul 24, 2014
- TEL FSI, Inc.
- Jeffrey M. Lauerhaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOOLS AND METHODS FOR PROCESSING MICROELECTRONIC WORKPIECES USING P...
- Publication number 20130213485
- Publication date Aug 22, 2013
- TEL FSI, Inc.
- Jeffrey M. Lauerhaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOOLS AND METHODS FOR PROCESSING MICROELECTRONIC WORKPIECES USING P...
- Publication number 20120272893
- Publication date Nov 1, 2012
- Jeffrey M. Lauerhaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Tools and methods for processing microelectronic workpieces using p...
- Publication number 20090280235
- Publication date Nov 12, 2009
- Jeffrey M. Lauerhaas
- H01 - BASIC ELECTRIC ELEMENTS

Jeffrey M. Lauerhaas

Person

Patents Grantslast 30 patents

System and method for monitoring treatment of microelectronic subst...

Tools and methods for processing microelectronic workpieces using p...

Process for removing carbon material from substrates

Tools and methods for processing microelectronic workpieces using p...

Tools and methods for processing microelectronic workpieces using p...

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR MONITORING TREATMENT OF MICROELECTRONIC SUBST...

RECIPE SELECTABLE DISPENSE SYSTEM AND METHOD OF OPERATING

METHOD FOR WET STRIPPING SILICON-CONTAINING ORGANIC LAYERS

PROCESS COMPRISING WATER VAPOR FOR HAZE ELIMINATION AND RESIDUE REM...

PROCESS FOR REMOVING CARBON MATERIAL FROM SUBSTRATES

TOOLS AND METHODS FOR PROCESSING MICROELECTRONIC WORKPIECES USING P...

TOOLS AND METHODS FOR PROCESSING MICROELECTRONIC WORKPIECES USING P...

Tools and methods for processing microelectronic workpieces using p...