Jeffrey P. Hebb

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Boston, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Advanced rapid thermal processing (RTP) using a linearly-moving hea...
- Patent number 6,768,084
- Issue date Jul 27, 2004
- Axcelis Technologies, Inc.
- Yong Liu
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
System and method of fast ambient switching for rapid thermal proce...
- Patent number 6,753,506
- Issue date Jun 22, 2004
- Axcelis Technologies
- Yong Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Advanced rapid thermal processing (RTP) using a linearly-moving hea...
- Publication number 20040060917
- Publication date Apr 1, 2004
- Yong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method of fast ambient switching for rapid thermal proce...
- Publication number 20030038127
- Publication date Feb 27, 2003
- Yong Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...