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High-rate CMP polishing method
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Patent number 10,857,647
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Issue date Dec 8, 2020
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Rohm and Haas Electronic Materials CMP Holdings
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John Vu Nguyen
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B24 - GRINDING POLISHING
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Trapezoidal CMP groove pattern
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Patent number 10,857,648
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Issue date Dec 8, 2020
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Rohm and Haas Electronic Materials CMP Holdings
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John Vu Nguyen
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B24 - GRINDING POLISHING
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Controlled residence CMP polishing method
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Patent number 10,861,702
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Issue date Dec 8, 2020
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Rohm and Haas Electronic Materials CMP Holdings
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John Vu Nguyen
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Biased pulse CMP groove pattern
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Patent number 10,777,418
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Issue date Sep 15, 2020
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Rohm and Haas Electronic Materials CMP Holdings, I
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John Vu Nguyen
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B24 - GRINDING POLISHING
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Uniform CMP polishing method
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Patent number 10,586,708
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Issue date Mar 10, 2020
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Rohm and Haas Electronic Materials CMP Holdings, Inc.
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John Vu Nguyen
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B24 - GRINDING POLISHING
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Curved grooving of polishing pads
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Patent number 7,234,224
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Issue date Jun 26, 2007
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Rohm and Haas Electronic Materials CMP Holdings, Inc.
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Steven Naugler
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR