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Jeffrey V. Musser
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Boise, ID, US
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last 30 patents
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Patent Grant
High density plasma etching of metallization layer using chlorine a...
Patent number
6,090,717
Issue date
Jul 18, 2000
Lam Research Corporation
Stephen F. Powell
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods and apparatus for etching a conductive layer to improve yield
Patent number
5,849,641
Issue date
Dec 15, 1998
Lam Research Corporation
David R. Arnett
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Temperature controlled anode for plasma dry etchers for etching sem...
Patent number
4,859,304
Issue date
Aug 22, 1989
Micron Technology, Inc.
David A. Cathey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...