Jeffrey W. Moen

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Oceanside, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Process monitoring system for lithography lasers
- Patent number 7,203,562
- Issue date Apr 10, 2007
- Cymer, Inc.
- Parthiv S. Patel
- G07 - CHECKING-DEVICES
Information Patent Grant
Process monitoring system for lithography lasers
- Patent number 6,687,562
- Issue date Feb 3, 2004
- Cymer, Inc.
- Parthiv S. Patel
- G07 - CHECKING-DEVICES

Patents Applicationslast 30 patents

Information Patent Application
Process monitoring system for lithography lasers
- Publication number 20040186609
- Publication date Sep 23, 2004
- Parthiv S. Patel
- G05 - CONTROLLING REGULATING
Information Patent Application
Process monitoring system for lithography lasers
- Publication number 20010020195
- Publication date Sep 6, 2001
- Parthiv S. Patel
- G05 - CONTROLLING REGULATING